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Michael J. Mark
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San Jose, CA, US
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last 30 patents
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Patent Grant
Measuring concentrations of radicals in semiconductor processing
Patent number
10,685,819
Issue date
Jun 16, 2020
Applied Materials, Inc.
Ramesh Gopalan
G01 - MEASURING TESTING
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Patent Grant
Apparatus and method for controlling edge performance in an inducti...
Patent number
8,999,106
Issue date
Apr 7, 2015
Applied Materials, Inc.
Wei Liu
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
MEASURING CONCENTRATIONS OF RADICALS IN SEMICONDUCTOR PROCESSING
Publication number
20180342377
Publication date
Nov 29, 2018
Applied Materials, Inc.
Ramesh GOPALAN
G01 - MEASURING TESTING
Information
Patent Application
APPARATUS AND METHOD FOR CONTROLLING EDGE PERFORMANCE IN AN INDUCTI...
Publication number
20090162952
Publication date
Jun 25, 2009
APPLIED MATERIALS, INC.
Wei Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR PROCESSING A SUBSTRATE USING INDUCTIVELY C...
Publication number
20090162570
Publication date
Jun 25, 2009
APPLIED MATERIALS, INC.
Johanes F. Swenberg
H01 - BASIC ELECTRIC ELEMENTS