Michael J. Meyer

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Tempe, AZ, US

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Patents Grantslast 30 patents

Information Patent Grant
Self-centering wafer support system
- Patent number 6,893,507
- Issue date May 17, 2005
- ASM America, Inc.
- Matthew G. Goodman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low mass wafer support system
- Patent number 6,454,865
- Issue date Sep 24, 2002
- ASM America, Inc.
- Matthew G. Goodman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Long life high temperature process chamber
- Patent number 6,325,858
- Issue date Dec 4, 2001
- ASM America, Inc.
- John F. Wengert
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Low-mass susceptor improvements
- Publication number 20050183829
- Publication date Aug 25, 2005
- Matthew G. Goodman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Self-centering wafer support system
- Publication number 20030029571
- Publication date Feb 13, 2003
- Matthew G. Goodman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Low mass wafer support system
- Publication number 20020043337
- Publication date Apr 18, 2002
- Matthew G. Goodman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...