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Michael J. Sershen

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  • Cambridge, MA, US
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    Automated Batch Production Thin Film Deposition Systems and Methods...
    • Publication number 20220076976
    • Publication date Mar 10, 2022
    • VEECO INSTRUMENTS INC.
    • Michael W. Pacier
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Plasma Enhanced ALD System
    • Publication number 20190284689
    • Publication date Sep 19, 2019
    • Ultratech, Inc.
    • Mark Sowa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Chuck Systems and Methods Having Enhanced Electrical Isolation For...
    • Publication number 20180216229
    • Publication date Aug 2, 2018
    • Ultratech, Inc.
    • Michael J. Sershen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA ENHANCED ALD SYSTEM
    • Publication number 20160281223
    • Publication date Sep 29, 2016
    • Ultratech, Inc.
    • Mark Sowa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Atomic Layer Deposition Head
    • Publication number 20160115596
    • Publication date Apr 28, 2016
    • Ultratech, Inc.
    • Michael J. Sershen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR HIGH-VELOCITY AND ATMOSPHERIC-PRESSURE ATOMIC LAYER DEPO...
    • Publication number 20150275363
    • Publication date Oct 1, 2015
    • Ultratech, Inc.
    • Michael J. Sershen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ALD COATING SYSTEM
    • Publication number 20120141676
    • Publication date Jun 7, 2012
    • Cambridge NanoTech Inc.
    • Michael J. Sershen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...