Michael J. Shawver

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Hayward, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Vacuum chamber gate valve
- Patent number 4,721,282
- Issue date Jan 26, 1988
- Lam Research Corporation
- Michael J. Shawver
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...