Michael J. Shillinger

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Santa Ynez, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Dual substrate electrostatic MEMS switch with hermetic seal and met...
- Patent number 7,528,691
- Issue date May 5, 2009
- Innovative Micro Technology
- Andrew D. Wallis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer level method for probing micromechanical devices
- Patent number 6,593,749
- Issue date Jul 15, 2003
- Innovative Micro Technology
- John Stuart Foster
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Dual substrate electrostatic MEMS switch with hermetic seal and met...
- Publication number 20070236313
- Publication date Oct 11, 2007
- Innovative Micro Technology
- Andrew D. Wallis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer level method for probing micromechanical devices
- Publication number 20020180452
- Publication date Dec 5, 2002
- John Stuart Foster
- G01 - MEASURING TESTING