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Michael John Foster
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Groton, MA, US
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last 30 patents
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Patent Grant
Method and apparatus for attachment of MEMS devices
Patent number
8,901,681
Issue date
Dec 2, 2014
Qualtre, Inc.
Michael John Foster
B81 - MICRO-STRUCTURAL TECHNOLOGY
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last 30 patents
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Patent Application
FIXED-FIXED MEMBRANE FOR MICROELECTROMECHANICAL SYSTEM MICROPHONE
Publication number
20240089668
Publication date
Mar 14, 2024
InvenSense, Inc.
Joseph Seeger
B81 - MICRO-STRUCTURAL TECHNOLOGY