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Michael Jozef Mathijs Renkens
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Sittard, NL
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Patents Grants
last 30 patents
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Patent Grant
Positioning system, lithographic apparatus and device manufacturing...
Patent number
8,144,310
Issue date
Mar 27, 2012
ASML Netherlands B.V.
Hans Butler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,554,105
Issue date
Jun 30, 2009
ASML Netherlands B.V.
Dominicus Jacobus Petrus A. Franken
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Device manufacturing method and lithographic apparatus
Patent number
7,426,015
Issue date
Sep 16, 2008
ASML Netherlands B.V.
Hendricus Johannes Maria Meijer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, device manufacturing method, and angular en...
Patent number
7,119,886
Issue date
Oct 10, 2006
ASML Netherlands B.V.
Martinus Hendrikus Antonius Leenders
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, measurement system, and device manufacturin...
Patent number
7,102,729
Issue date
Sep 5, 2006
ASML Netherlands B.V.
Michael Jozef Mathijs Renkens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Positioning System, Lithographic Apparatus and Device Manufacturing...
Publication number
20120147355
Publication date
Jun 14, 2012
ASML NETHERLANDS B.V.
Hans Butler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Imprint Lithography Apparatus and Method
Publication number
20110001254
Publication date
Jan 6, 2011
ASML NETHERLANDS B.V.
Yvonne Wendela Kruijt-Stegeman
B82 - NANO-TECHNOLOGY
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Patent Application
Positioning System, Lithographic Apparatus and Device Manufacturing...
Publication number
20090262325
Publication date
Oct 22, 2009
ASML NETHERLANDS B.V.
Hans Butler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DEVICE MANUFACTURING METHOD AND LITHOGRAPHIC APPARATUS
Publication number
20080170210
Publication date
Jul 17, 2008
ASML NETHERLANDS B.V.
Hendricus Johannes Maria Meijer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, measurement system, and device manufacturin...
Publication number
20050168714
Publication date
Aug 4, 2005
ASML NETHERLANDS B.V.
Michael Jozef Mathijs Renkens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY