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Michael Jozefa Mathijs Renkens
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Sittard, NL
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last 30 patents
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Patent Application
IMPRINT LITHOGRAPHY APPARATUS AND METHOD
Publication number
20160195823
Publication date
Jul 7, 2016
ASML NETHERLANDS B.V.
Yvonne Wendela KRUIJT-STEGEMAN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
Lithographic apparatus, device manufacturing method, and device man...
Publication number
20060249693
Publication date
Nov 9, 2006
ASML NETHERLANDS B.V.
Johannes Cornelis Driessen
G01 - MEASURING TESTING