Michael K. Templeton

Person

Atherton, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Inverse resist coating process
- Patent number 7,943,289
- Issue date May 17, 2011
- GLOBALFOUNDRIES Inc.
- Bharath Rangarajan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Recirculation and reuse of dummy dispensed resist
- Patent number 7,591,902
- Issue date Sep 22, 2009
- GLOBALFOUNDRIES Inc.
- Bharath Rangarajan
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Re-circulation and reuse of dummy-dispensed resist
- Patent number 7,153,364
- Issue date Dec 26, 2006
- Advance Micro Devices, Inc.
- Bharath Rangarajan
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
In situ particle monitoring for defect reduction
- Patent number 7,145,653
- Issue date Dec 5, 2006
- Advanced Micro Devices, Inc.
- Michael K. Templeton
- G01 - MEASURING TESTING
Information Patent Grant
Barcode marking of wafer products for inventory control
- Patent number 7,100,826
- Issue date Sep 5, 2006
- Advanced Micro Devices, Inc.
- Khoi A. Phan
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Dual layer patterning scheme to make dual damascene
- Patent number 7,078,348
- Issue date Jul 18, 2006
- Advanced Micro Devices, Inc.
- Bhanwar Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Growing copper vias or lines within a patterned resist using a copp...
- Patent number 6,905,950
- Issue date Jun 14, 2005
- Advanced Micro Devices, Inc.
- Ramkumar Subramanian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for rapidly and uniformly cooling resist
- Patent number 6,889,763
- Issue date May 10, 2005
- Advanced Micro Devices, Inc.
- Ramkumar Subramanian
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Grant
Systems and methods to determine seed layer thickness of trench sid...
- Patent number 6,879,051
- Issue date Apr 12, 2005
- Advanced Micro Devices, Inc.
- Bhanwar Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System for monitoring and analyzing diagnostic data of spin tracks
- Patent number 6,845,345
- Issue date Jan 18, 2005
- Advanced Micro Devices, Inc.
- Bhanwar Singh
- G05 - CONTROLLING REGULATING
Information Patent Grant
Pinhole defect repair by resist flow
- Patent number 6,834,158
- Issue date Dec 21, 2004
- Advanced Micro Devices, Inc.
- Michael K. Templeton
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Parallel plate development with the application of a differential v...
- Patent number 6,830,389
- Issue date Dec 14, 2004
- Advanced Micro Devices, Inc.
- Michael K. Templeton
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for active control of BPSG deposition
- Patent number 6,828,162
- Issue date Dec 7, 2004
- Advanced Micro Devices, Inc.
- Arvind Halliyal
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus of monitoring and optimizing the development of a photore...
- Patent number 6,819,427
- Issue date Nov 16, 2004
- Advanced Micro Devices, Inc.
- Ramkumar Subramanian
- G01 - MEASURING TESTING
Information Patent Grant
System and method for process monitoring of polysilicon etch
- Patent number 6,778,268
- Issue date Aug 17, 2004
- Advanced Micro Devices, Sinc.
- Bhanwar Singh
- G01 - MEASURING TESTING
Information Patent Grant
Interlayer dielectric void detection
- Patent number 6,774,989
- Issue date Aug 10, 2004
- Advanced Micro Devices, Inc.
- Bharath Rangarajan
- G01 - MEASURING TESTING
Information Patent Grant
Scatterometry based measurements of a rotating substrate
- Patent number 6,771,374
- Issue date Aug 3, 2004
- Advanced Micro Devices, Inc.
- Bharath Rangarajan
- G01 - MEASURING TESTING
Information Patent Grant
Acoustic microbalance for in-situ deposition process monitoring and...
- Patent number 6,752,899
- Issue date Jun 22, 2004
- Advanced Micro Devices, Inc.
- Bhanwar Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Use of surface coupling agent to improve adhesion
- Patent number 6,746,822
- Issue date Jun 8, 2004
- Advanced Micro Devices, Inc.
- Bharath Rangarajan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for decreasing the spaces between wordlines
- Patent number 6,727,195
- Issue date Apr 27, 2004
- Advanced Micro Devices, Inc.
- Michael K. Templeton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scatterometry based measurements of a moving substrate
- Patent number 6,704,101
- Issue date Mar 9, 2004
- Advanced Micro Devices, Inc.
- Bharath Rangarajan
- G01 - MEASURING TESTING
Information Patent Grant
Parallel plate development with multiple holes in top plate for con...
- Patent number 6,688,784
- Issue date Feb 10, 2004
- Advanced Micro Devices, Inc.
- Michael K. Templeton
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Growing a dual damascene structure using a copper seed layer and a...
- Patent number 6,670,271
- Issue date Dec 30, 2003
- Advanced Micro Devices, Inc.
- Ramkumar Subramanian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Non self-aligned shallow trench isolation process with disposable s...
- Patent number 6,664,191
- Issue date Dec 16, 2003
- Advanced Micro Devices, Inc.
- Unsoon Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vapor drying for cleaning photoresists
- Patent number 6,663,723
- Issue date Dec 16, 2003
- Advanced Micro Devices, Inc.
- Michael K. Templeton
- B08 - CLEANING
Information Patent Grant
Scatterometry techniques to ascertain asymmetry profile of features...
- Patent number 6,650,422
- Issue date Nov 18, 2003
- Advanced Micro Devices, Inc.
- Bhanwar Singh
- G01 - MEASURING TESTING
Information Patent Grant
System and method for active control of spacer deposition
- Patent number 6,649,426
- Issue date Nov 18, 2003
- Advanced Micro Devices, Inc.
- Bharath Rangarajan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Treat resist surface to prevent pattern collapse
- Patent number 6,645,702
- Issue date Nov 11, 2003
- Advanced Micro Devices, Inc.
- Bharath Rangarajan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for uniformly heating photoresist
- Patent number 6,643,604
- Issue date Nov 4, 2003
- Advanced Micro Devices, Inc.
- Ramkumar Subramanian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for in situ control of post exposure bake time an...
- Patent number 6,641,963
- Issue date Nov 4, 2003
- Advanced Micro Devices, Inc.
- Bharath Rangarajan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
RECIRCULATION AND REUSE OF DUMMY DISPENSED RESIST
- Publication number 20070261636
- Publication date Nov 15, 2007
- Advanced Micro Devices, Inc.
- Bharath Rangarajan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Inverse resist coating process
- Publication number 20050164133
- Publication date Jul 28, 2005
- Advanced Micro Devices, Inc.
- Bharath Rangarajan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM AND METHOD FOR ACTIVE CONTROL OF SPACER DEPOSITION
- Publication number 20030153104
- Publication date Aug 14, 2003
- Bharath Rangarajan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Nozzle arm movement for resist development
- Publication number 20030068430
- Publication date Apr 10, 2003
- Ramkumar Subramanian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Critical dimension monitoring from latent image
- Publication number 20030002878
- Publication date Jan 2, 2003
- Bhanwar Singh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Using scatterometry for etch end points for dual damascene process
- Publication number 20030000644
- Publication date Jan 2, 2003
- Ramkumar Subramanian
- G01 - MEASURING TESTING
Information Patent Application
Using scatterometry to develop real time etch image
- Publication number 20030000922
- Publication date Jan 2, 2003
- Ramkumar Subramanian
- G01 - MEASURING TESTING
Information Patent Application
Growing copper vias or lines within a patterned resist using a copp...
- Publication number 20030003701
- Publication date Jan 2, 2003
- Ramkumar Subramanian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Inverse resist coating process
- Publication number 20020155389
- Publication date Oct 24, 2002
- Bharath Rangarajan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Scatterometry techniques to ascertain asymmetry profile of features...
- Publication number 20020135781
- Publication date Sep 26, 2002
- Bhanwar Singh
- G01 - MEASURING TESTING
Information Patent Application
Methodology to mitigate electron beam induced charge dissipation on...
- Publication number 20020100903
- Publication date Aug 1, 2002
- Bhanwar Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Parallel plate development with the application of a differential v...
- Publication number 20020046703
- Publication date Apr 25, 2002
- Michael K. Templeton
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and system for providing a robust alignment mark at thin oxi...
- Publication number 20020011678
- Publication date Jan 31, 2002
- Michael K. Templeton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ULTRA-THIN RESIST COATING QUALITYBY BY INCREASING SURFACE ROUGHNESS...
- Publication number 20020004300
- Publication date Jan 10, 2002
- MARINA V. PLAT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and system for decreasing the spaces between wordlines
- Publication number 20010045648
- Publication date Nov 29, 2001
- Michael K. Templeton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
USE OF SILICON OXYNITRIDE ARC FOR METAL LAYERS
- Publication number 20010046791
- Publication date Nov 29, 2001
- RAMKUMAR SUBRAMANIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and system for improving the dimensional accuracy of core so...
- Publication number 20010034124
- Publication date Oct 25, 2001
- Michael K. Templeton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and system for improved control of lines adjacent to a selec...
- Publication number 20010034113
- Publication date Oct 25, 2001
- Michael K. Templeton
- H01 - BASIC ELECTRIC ELEMENTS

Michael K. Templeton

Person

Patents Grantslast 30 patents

Inverse resist coating process

Recirculation and reuse of dummy dispensed resist

Re-circulation and reuse of dummy-dispensed resist

In situ particle monitoring for defect reduction

Barcode marking of wafer products for inventory control

Dual layer patterning scheme to make dual damascene

Growing copper vias or lines within a patterned resist using a copp...

System for rapidly and uniformly cooling resist

Systems and methods to determine seed layer thickness of trench sid...

System for monitoring and analyzing diagnostic data of spin tracks

Pinhole defect repair by resist flow

Parallel plate development with the application of a differential v...

System and method for active control of BPSG deposition

Apparatus of monitoring and optimizing the development of a photore...

System and method for process monitoring of polysilicon etch

Interlayer dielectric void detection

Scatterometry based measurements of a rotating substrate

Acoustic microbalance for in-situ deposition process monitoring and...

Use of surface coupling agent to improve adhesion

Method and system for decreasing the spaces between wordlines

Scatterometry based measurements of a moving substrate

Parallel plate development with multiple holes in top plate for con...

Growing a dual damascene structure using a copper seed layer and a...

Non self-aligned shallow trench isolation process with disposable s...

Vapor drying for cleaning photoresists

Scatterometry techniques to ascertain asymmetry profile of features...

System and method for active control of spacer deposition

Treat resist surface to prevent pattern collapse

System for uniformly heating photoresist

System and method for in situ control of post exposure bake time an...

Patents Applicationslast 30 patents

RECIRCULATION AND REUSE OF DUMMY DISPENSED RESIST

Inverse resist coating process

SYSTEM AND METHOD FOR ACTIVE CONTROL OF SPACER DEPOSITION

Nozzle arm movement for resist development

Critical dimension monitoring from latent image

Using scatterometry for etch end points for dual damascene process

Using scatterometry to develop real time etch image

Growing copper vias or lines within a patterned resist using a copp...

Inverse resist coating process

Scatterometry techniques to ascertain asymmetry profile of features...

Methodology to mitigate electron beam induced charge dissipation on...

Parallel plate development with the application of a differential v...

Method and system for providing a robust alignment mark at thin oxi...

ULTRA-THIN RESIST COATING QUALITYBY BY INCREASING SURFACE ROUGHNESS...

Method and system for decreasing the spaces between wordlines

USE OF SILICON OXYNITRIDE ARC FOR METAL LAYERS

Method and system for improving the dimensional accuracy of core so...

Method and system for improved control of lines adjacent to a selec...