Michael Kamp-Froese

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Aalen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method for the tracking and identification of components of lithogr...
- Patent number 11,927,888
- Issue date Mar 12, 2024
- Carl Zeiss SMT GmbH
- Michael Kamp-Froese
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for operating a machine for microlithography
- Patent number 11,480,883
- Issue date Oct 25, 2022
- Carl Zeiss SMT GmbH
- Michael Kamp-Froese
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and device for characterizing a mask for microlithography
- Patent number 11,188,000
- Issue date Nov 30, 2021
- Carl Zeiss SMT GmbH
- Michael Kamp-Froese
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR THE TRACKING AND IDENTIFICATION OF COMPONENTS OF LITHOGR...
- Publication number 20220342320
- Publication date Oct 27, 2022
- Carl Zeiss SMT GMBH
- Michael Kamp-Froese
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND DEVICE FOR CHARACTERIZING A MASK FOR MICROLITHOGRAPHY
- Publication number 20200363737
- Publication date Nov 19, 2020
- Carl Zeiss SMT GMBH
- Michael Kamp-Froese
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR OPERATING A MACHINE FOR MICROLITHOGRAPHY
- Publication number 20190278187
- Publication date Sep 12, 2019
- Carl Zeiss SMT GMBH
- Michael Kamp-Froese
- G06 - COMPUTING CALCULATING COUNTING