Michael Kenny

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Kalispell, MT, US

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Patents Applicationslast 30 patents

Information Patent Application
Single wafer cleaning with ozone
- Publication number 20040103919
- Publication date Jun 3, 2004
- Michael Kenny
- B08 - CLEANING
Information Patent Application
Process and apparatus for treating a workpiece such as a semiconduc...
- Publication number 20020157686
- Publication date Oct 31, 2002
- Semitool, Inc.
- Michael Kenny
- H01 - BASIC ELECTRIC ELEMENTS