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MICHAEL KIEFER
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Neuhausen, DE
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last 30 patents
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Patent Application
METHODS AND APPARATUS FOR RECOVERY AND REUSE OF REAGENTS
Publication number
20120091099
Publication date
Apr 19, 2012
Applied Materials, Inc.
MICHAEL KIEFER
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
POINT OF USE RECYCLING SYSTEM FOR CMP SLURRY
Publication number
20110070811
Publication date
Mar 24, 2011
Applied Materials, Inc.
Andreas Neuber
B24 - GRINDING POLISHING
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Patent Application
METHODS AND APPARATUS FOR PROCESS ABATEMENT WITH RECOVERY AND REUSE...
Publication number
20110023908
Publication date
Feb 3, 2011
Applied Materials, Inc.
ANDREAS NEUBER
B08 - CLEANING