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Michael Kiene
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Radebeul, DE
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last 30 patents
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Patent Grant
Nitrogen-enriched low-k barrier layer for a copper metallization layer
Patent number
7,022,602
Issue date
Apr 4, 2006
Advanced Micro Devices, Inc.
Hartmut Ruelke
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Semiconductor device including a low-k metallization layer stack fo...
Publication number
20060043588
Publication date
Mar 2, 2006
Christof Streck
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Nitrogen-enriched low-k barrier layer for a copper metallization layer
Publication number
20040214430
Publication date
Oct 28, 2004
Hartmut Ruelke
H01 - BASIC ELECTRIC ELEMENTS