Michael Klick

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Berlin, DE

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Patents Grantslast 30 patents

Information Patent Grant
Wafer boat and treatment apparatus for wafers
- Patent number 10,867,825
- Issue date Dec 15, 2020
- Michael Klick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for determining of absolute plasma parameters
- Patent number 5,861,752
- Issue date Jan 19, 1999
- Michael Klick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for determining absolute plasma parameters
- Patent number 5,705,931
- Issue date Jan 6, 1998
- Adolph Slaby Instituut Forschungsgesellschaft fur Plasmatechnologie und Mikro...
- Michael Klick
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA-TREATMENT DEVICE FOR WAFERS
- Publication number 20180076070
- Publication date Mar 15, 2018
- Michael Klick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER BOAT AND TREATMENT APPARATUS FOR WAFERS
- Publication number 20180076071
- Publication date Mar 15, 2018
- Michael Klick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER BOAT AND PLASMA TREATMENT DEVICE FOR WAFERS
- Publication number 20180066354
- Publication date Mar 8, 2018
- Michael Klick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...