Michael Kotelyanskii

Person

Chatham, NJ, US

People

Patents Grantslast 30 patents

Information Patent Grant
Characterization of patterned structures using acoustic metrology
- Patent number 11,988,641
- Issue date May 21, 2024
- Onto Innovation Inc.
- Manjusha Mehendale
- G01 - MEASURING TESTING
Information Patent Grant
Opto-acoustic metrology of signal attenuating structures
- Patent number 10,209,300
- Issue date Feb 19, 2019
- Rudolph Technologies, Inc.
- Michael Kotelyanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Non-destructive acoustic metrology for void detection
- Patent number 9,991,176
- Issue date Jun 5, 2018
- Rudolph Technologies, Inc.
- Manjusha Mehendale
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical acoustic substrate assessment system and method
- Patent number 9,576,862
- Issue date Feb 21, 2017
- Rudolph Technologies, Inc.
- Todd Murray
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Position sensitive detection optimization
- Patent number 9,140,601
- Issue date Sep 22, 2015
- Rudolph Technologies, Inc.
- Manjusha Mehendale
- G01 - MEASURING TESTING
Information Patent Grant
Substrate analysis using surface acoustic wave metrology
- Patent number 9,041,931
- Issue date May 26, 2015
- Rudolph Technologies, Inc.
- Michael Colgan
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Multiple measurement techniques including focused beam scatterometr...
- Patent number 8,699,027
- Issue date Apr 15, 2014
- Rudolph Technologies, Inc.
- Robert Gregory Wolf
- G01 - MEASURING TESTING
Information Patent Grant
Multiple measurement techniques including focused beam scatterometr...
- Patent number 8,139,232
- Issue date Mar 20, 2012
- Rudolph Technologies, Inc.
- Robert Gregory Wolf
- G01 - MEASURING TESTING
Information Patent Grant
Combination of ellipsometry and optical stress generation and detec...
- Patent number 7,903,238
- Issue date Mar 8, 2011
- Rudolph Technologies, Inc.
- Manjusha Mehendale
- G01 - MEASURING TESTING
Information Patent Grant
Measuring elastic moduli of dielectric thin films using an optical...
- Patent number 7,019,845
- Issue date Mar 28, 2006
- Rudolph Technologies, Inc.
- Sean P. Leary
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
MULTI PUMP-PROBE ENCODING-DECODING FOR OPTO-ACOUSTIC METROLOGY
- Publication number 20240329005
- Publication date Oct 3, 2024
- ONTO INNOVATION INC.
- Michael J. Kotelyanskii
- G01 - MEASURING TESTING
Information Patent Application
CHARACTERIZATION OF PATTERNED STRUCTURES USING ACOUSTIC METROLOGY
- Publication number 20210318270
- Publication date Oct 14, 2021
- ONTO INNOVATION INC.
- Manjusha Mehendale
- G01 - MEASURING TESTING
Information Patent Application
NON-DESTRUCTIVE ACOUSTIC METROLOGY FOR VOID DETECTION
- Publication number 20170221778
- Publication date Aug 3, 2017
- The Regents of the University of Colorado
- Manjusha MEHENDALE
- G01 - MEASURING TESTING
Information Patent Application
OPTO-ACOUSTIC METROLOGY OF SIGNAL ATTENUATING STRUCTURES
- Publication number 20170141004
- Publication date May 18, 2017
- Rudolph Technologies, Inc.
- Michael Kotelyanskii
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL ACOUSTIC SUBSTRATE ASSESSMENT SYSTEM AND METHOD
- Publication number 20160043008
- Publication date Feb 11, 2016
- Todd MURRAY
- G01 - MEASURING TESTING
Information Patent Application
MULTIPLE MEASUREMENT TECHNIQUES INCLUDING FOCUSED BEAM SCATTEROMETR...
- Publication number 20140375983
- Publication date Dec 25, 2014
- Rudolph Technologies, Inc.
- Robert Gregory Wolf
- G01 - MEASURING TESTING
Information Patent Application
POSITION SENSITIVE DETECTION OPTIMIZATION
- Publication number 20140103188
- Publication date Apr 17, 2014
- Manjusha Mehendale
- G01 - MEASURING TESTING
Information Patent Application
Substrate Analysis Using Surface Acoustic Wave Metrology
- Publication number 20120309116
- Publication date Dec 6, 2012
- Michael Colgan
- B82 - NANO-TECHNOLOGY
Information Patent Application
MULTIPLE MEASUREMENT TECHNIQUES INCLUDING FOCUSED BEAM SCATTEROMETR...
- Publication number 20120268744
- Publication date Oct 25, 2012
- Rudolph Technologies
- Robert Gregory WOLF
- G01 - MEASURING TESTING
Information Patent Application
Structure Model description and use for scatterometry-based semicon...
- Publication number 20090306941
- Publication date Dec 10, 2009
- Michael Kotelyanskii
- G01 - MEASURING TESTING
Information Patent Application
MULTIPLE MEASUREMENT TECHNIQUES INCLUDING FOCUSED BEAM SCATTEROMETR...
- Publication number 20090279090
- Publication date Nov 12, 2009
- Robert Gregory Wolf
- G01 - MEASURING TESTING
Information Patent Application
Combination of ellipsometry and optical stress generation and detec...
- Publication number 20090244516
- Publication date Oct 1, 2009
- Manjusha Mehendale
- G01 - MEASURING TESTING
Information Patent Application
Combined ultra-fast x-ray and optical system for thin film measurem...
- Publication number 20060256916
- Publication date Nov 16, 2006
- Rudolph Technologies, Inc.
- Michael Kotelyanskii
- G01 - MEASURING TESTING
Information Patent Application
MEASURING ELASTIC MODULI OF DIELECTRIC THIN FILMS USING AN OPTICAL...
- Publication number 20060072120
- Publication date Apr 6, 2006
- Rudolph Technologies, Inc.
- Sean P. Leary
- G01 - MEASURING TESTING

Michael Kotelyanskii

Person

Patents Grantslast 30 patents

Characterization of patterned structures using acoustic metrology

Opto-acoustic metrology of signal attenuating structures

Non-destructive acoustic metrology for void detection

Optical acoustic substrate assessment system and method

Position sensitive detection optimization

Substrate analysis using surface acoustic wave metrology

Multiple measurement techniques including focused beam scatterometr...

Multiple measurement techniques including focused beam scatterometr...

Combination of ellipsometry and optical stress generation and detec...

Measuring elastic moduli of dielectric thin films using an optical...

Patents Applicationslast 30 patents

MULTI PUMP-PROBE ENCODING-DECODING FOR OPTO-ACOUSTIC METROLOGY

CHARACTERIZATION OF PATTERNED STRUCTURES USING ACOUSTIC METROLOGY

NON-DESTRUCTIVE ACOUSTIC METROLOGY FOR VOID DETECTION

OPTO-ACOUSTIC METROLOGY OF SIGNAL ATTENUATING STRUCTURES

OPTICAL ACOUSTIC SUBSTRATE ASSESSMENT SYSTEM AND METHOD

MULTIPLE MEASUREMENT TECHNIQUES INCLUDING FOCUSED BEAM SCATTEROMETR...

POSITION SENSITIVE DETECTION OPTIMIZATION

Substrate Analysis Using Surface Acoustic Wave Metrology

MULTIPLE MEASUREMENT TECHNIQUES INCLUDING FOCUSED BEAM SCATTEROMETR...

Structure Model description and use for scatterometry-based semicon...

MULTIPLE MEASUREMENT TECHNIQUES INCLUDING FOCUSED BEAM SCATTEROMETR...

Combination of ellipsometry and optical stress generation and detec...

Combined ultra-fast x-ray and optical system for thin film measurem...

MEASURING ELASTIC MODULI OF DIELECTRIC THIN FILMS USING AN OPTICAL...