Michael Kovalerchik

Person

Castro Valley, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Stage assembly having a follower assembly
- Patent number 6,903,346
- Issue date Jun 7, 2005
- Nikon Corporation
- Michael R. Sogard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Positioning stage with stationary actuators
- Patent number 6,781,138
- Issue date Aug 24, 2004
- Nikon Corp.
- W. Thomas Novak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Positioning stage with stationary and movable magnet tracks
- Patent number 6,753,534
- Issue date Jun 22, 2004
- Nikon Corporation
- W. Thomas Novak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Connection assembly of wafer stage chamber
- Patent number 6,570,644
- Issue date May 27, 2003
- Nikon Corporation
- Michael Binnard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Cantilever stage
- Patent number 6,515,381
- Issue date Feb 4, 2003
- Nikon Corporation
- W. Thomas Novak
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
ROTARY SEAL FOR DIFFUSION FURNANCE INCORPORATING NONMETALLIC SEALS
- Publication number 20080079220
- Publication date Apr 3, 2008
- AVIZA TECHNOLOGY, INC.
- Michael Kovalerchik
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Positioning stage with stationary and movable magnet tracks
- Publication number 20030230729
- Publication date Dec 18, 2003
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stage assembly having a follower assembly
- Publication number 20030010935
- Publication date Jan 16, 2003
- Michael R. Sogard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Connection assembly of wafer stage chamber
- Publication number 20020180945
- Publication date Dec 5, 2002
- NIKON CORPORATION
- Michael Binnard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Positioning stage with stationary actuators
- Publication number 20020179850
- Publication date Dec 5, 2002
- W. Thomas Novak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Base assembly for a stage chamber of a wafer manufacturing system
- Publication number 20020159046
- Publication date Oct 31, 2002
- NIKON CORPORATION
- Michael Binnard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Positioning stage with stationary and movable magnet tracks
- Publication number 20020074516
- Publication date Jun 20, 2002
- W. Thomas Novak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cantilever reticle stage for electron beam projection lithography s...
- Publication number 20020021427
- Publication date Feb 21, 2002
- Douglas C. Watson
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Michael Kovalerchik

Person

Patents Grantslast 30 patents

Stage assembly having a follower assembly

Positioning stage with stationary actuators

Positioning stage with stationary and movable magnet tracks

Connection assembly of wafer stage chamber

Cantilever stage

Patents Applicationslast 30 patents

ROTARY SEAL FOR DIFFUSION FURNANCE INCORPORATING NONMETALLIC SEALS

Positioning stage with stationary and movable magnet tracks

Stage assembly having a follower assembly

Connection assembly of wafer stage chamber

Positioning stage with stationary actuators

Base assembly for a stage chamber of a wafer manufacturing system

Positioning stage with stationary and movable magnet tracks

Cantilever reticle stage for electron beam projection lithography s...