Michael Kuechel

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Oberkochen, DE

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Patents Grantslast 30 patents

Information Patent Grant
In situ calibration of interferometers
- Patent number 9,234,739
- Issue date Jan 12, 2016
- Zygo Corporation
- Daniel M. Sykora
- G01 - MEASURING TESTING
Information Patent Grant
In situ calibration of interferometers
- Patent number 9,103,649
- Issue date Aug 11, 2015
- Zygo Corporation
- Daniel M. Sykora
- G01 - MEASURING TESTING
Information Patent Grant
Metrology system for precision 3D motion
- Patent number 6,876,453
- Issue date Apr 5, 2005
- Zygo Corporation
- Matthew Van Doren
- G01 - MEASURING TESTING
Information Patent Grant
Moiré method and a system for measuring the distortion of a...
- Patent number 6,816,247
- Issue date Nov 9, 2004
- Carl Zeiss SMT AG
- Joachim Heppner
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method(s) for reducing the effects of coherent artifa...
- Patent number 6,804,011
- Issue date Oct 12, 2004
- Michael Kuechel
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
IN SITU CALIBRATION OF INTERFEROMETERS
- Publication number 20150055139
- Publication date Feb 26, 2015
- Zygo Corporation
- Daniel M. Sykora
- G01 - MEASURING TESTING
Information Patent Application
IN SITU CALIBRATION OF INTERFEROMETERS
- Publication number 20130063730
- Publication date Mar 14, 2013
- Zygo Corporation
- Daniel M. Sykora
- G01 - MEASURING TESTING
Information Patent Application
Metrology system for precision 3D motion
- Publication number 20030223078
- Publication date Dec 4, 2003
- Matthew Van Doren
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and method(s) for reducing the effects of coherent artifa...
- Publication number 20030030819
- Publication date Feb 13, 2003
- Michael Kuechel
- G01 - MEASURING TESTING