Michael L. Parodi

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Alamo, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Oscillatory chuck method and apparatus for coating flat substrates
- Patent number 5,798,140
- Issue date Aug 25, 1998
- Semiconductor Systems, Inc.
- Michael L. Parodi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for curing photoresist
- Patent number 5,766,824
- Issue date Jun 16, 1998
- Semiconductor Systems, Inc.
- William T. Batchelder
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Clustered photolithography system
- Patent number 5,651,823
- Issue date Jul 29, 1997
- Semiconductor Systems, Inc.
- Michael L. Parodi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY