Michael Labunsky

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San Carlos, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for conditioning a polishing pad used in chemi...
- Patent number 6,328,637
- Issue date Dec 11, 2001
- Lam Research Corporation
- Michael Labunsky
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus and method for film thickness measurement integrated into...
- Patent number 6,132,289
- Issue date Oct 17, 2000
- Lam Research Corporation
- Michael Labunsky
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for conditioning a polishing pad used in chemi...
- Patent number 6,086,460
- Issue date Jul 11, 2000
- Lam Research Corporation
- Michael Labunsky
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
Methods and apparatus for polishing and planarization
- Publication number 20020137431
- Publication date Sep 26, 2002
- Michael A. Labunsky
- B24 - GRINDING POLISHING