Michael Layh

Person

Altusried, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Confocal measuring apparatus for 3D measurement of an object surface
- Patent number 12,235,094
- Issue date Feb 25, 2025
- Hochschule für angewandte Wissenschaften Kempten Körperschaft des öffentliche...
- Korbinian Prause
- G01 - MEASURING TESTING
Information Patent Grant
Illumination system having a beam deflection array for illuminating...
- Patent number 10,241,416
- Issue date Mar 26, 2019
- Carl Zeiss SMT GmbH
- Markus Deguenther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system for illuminating a mask in a microlithographic...
- Patent number 10,191,382
- Issue date Jan 29, 2019
- Carl Zeiss SMT GmbH
- Erich Schubert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Microlithographic projection exposure apparatus having a multi-mirr...
- Patent number 10,146,135
- Issue date Dec 4, 2018
- Carl Zeiss SMT GmbH
- Michael Layh
- G02 - OPTICS
Information Patent Grant
Illumination system and projection objective of a mask inspection a...
- Patent number 10,114,293
- Issue date Oct 30, 2018
- Carl Zeiss SMT GmbH
- Heiko Feldmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system for illuminating a mask in a microlithographic...
- Patent number 9,977,333
- Issue date May 22, 2018
- Carl Zeiss SMT GmbH
- Erich Schubert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Microlithography illumination optical system and microlithography p...
- Patent number 9,933,704
- Issue date Apr 3, 2018
- Carl Zeiss SMT GmbH
- Michael Patra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and device for monitoring multiple mirror arrays in an illum...
- Patent number 9,897,925
- Issue date Feb 20, 2018
- Carl Zeiss SMT GmbH
- Stefan Xalter
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Arrangement of a mirror
- Patent number 9,658,533
- Issue date May 23, 2017
- Carl Zeiss SMT GmbH
- Johannes Ruoff
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Illumination system for illuminating a mask in a microlithographic...
- Patent number 9,599,904
- Issue date Mar 21, 2017
- Carl Zeiss SMT GmbH
- Erich Schubert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system for a microlithographic projection exposure app...
- Patent number 9,575,414
- Issue date Feb 21, 2017
- Carl Zeiss SMT GmbH
- Johannes Wangler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Microlithographic illumination system
- Patent number 9,341,953
- Issue date May 17, 2016
- Carl Zeiss SMT GmbH
- Markus Deguenther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system for illuminating a mask in a microlithographic...
- Patent number 9,310,694
- Issue date Apr 12, 2016
- Carl Zeiss SMT GmbH
- Erich Schubert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Component for setting a scan-integrated illumination energy in an o...
- Patent number 9,310,692
- Issue date Apr 12, 2016
- Carl Zeiss SMT GmbH
- Ralf Stuetzle
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system for EUV microlithography
- Patent number 9,304,400
- Issue date Apr 5, 2016
- Carl Zeiss SMT GmbH
- Michael Layh
- G02 - OPTICS
Information Patent Grant
Method and device for monitoring multiple mirror arrays in an illum...
- Patent number 9,239,229
- Issue date Jan 19, 2016
- Carl Zeiss SMT GmbH
- Stefan Xalter
- G01 - MEASURING TESTING
Information Patent Grant
Illumination system for a microlithographic projection exposure app...
- Patent number 9,217,930
- Issue date Dec 22, 2015
- Carl Zeiss SMT GmbH
- Johannes Wangler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for adjusting an illumination system of a projection exposur...
- Patent number 9,176,390
- Issue date Nov 3, 2015
- Carl Zeiss SMT GmbH
- Michael Layh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and device for monitoring multiple mirror arrays in an illum...
- Patent number 9,019,475
- Issue date Apr 28, 2015
- Carl Zeiss SMT GmbH
- Stefan Xalter
- G01 - MEASURING TESTING
Information Patent Grant
Method and device for monitoring multiple mirror arrays in an illum...
- Patent number 9,013,684
- Issue date Apr 21, 2015
- Carl Zeiss SMT GmbH
- Stefan Xalter
- G01 - MEASURING TESTING
Information Patent Grant
Illumination system having a beam deflection array for illuminating...
- Patent number 9,007,563
- Issue date Apr 14, 2015
- Carl Zeiss SMT GmbH
- Markus Deguenther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
EUV collector with cooling device
- Patent number 9,007,559
- Issue date Apr 14, 2015
- Carl Zeiss SMT GmbH
- Michael Layh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and device for monitoring multiple mirror arrays in an illum...
- Patent number 9,001,309
- Issue date Apr 7, 2015
- Carl Zeiss SMT GmbH
- Stefan Xalter
- G01 - MEASURING TESTING
Information Patent Grant
Microlithographic projection exposure apparatus
- Patent number 8,891,057
- Issue date Nov 18, 2014
- Carl Zeiss SMT GmbH
- Michael Layh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for measuring an optical system
- Patent number 8,786,849
- Issue date Jul 22, 2014
- Carl Zeiss SMT GmbH
- Thomas Korb
- G01 - MEASURING TESTING
Information Patent Grant
Microlithographic projection exposure apparatus having a multi-mirr...
- Patent number 8,724,086
- Issue date May 13, 2014
- Carl Zeiss SMT GmbH
- Michael Layh
- G02 - OPTICS
Information Patent Grant
Microlithographic illumination system
- Patent number 8,705,005
- Issue date Apr 22, 2014
- Carl Zeiss SMT GmbH
- Markus Deguenther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system for a microlithography projection exposure appa...
- Patent number 8,537,335
- Issue date Sep 17, 2013
- Carl Zeiss SMT GmbH
- Markus Schwab
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical integrator for an illumination system of a microlithographi...
- Patent number 8,520,307
- Issue date Aug 27, 2013
- Carl Zeiss SMT GmbH
- Oliver Wolf
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Illumination system for illuminating a mask in a microlithographic...
- Patent number 8,467,031
- Issue date Jun 18, 2013
- Carl Zeiss SMT GmbH
- Erich Schubert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Confocal measuring apparatus for 3D measurement of an object surface
- Publication number 20230003514
- Publication date Jan 5, 2023
- Hochschule für angewandte Wissenschaften Kempten Körperschaft des öffentliche...
- Korbinian PRAUSE
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR OPERATING A PROCESSING INSTALLATION WITH A MOVABLE PUNCH
- Publication number 20210086250
- Publication date Mar 25, 2021
- Maximilian Lorenz
- B26 - HAND CUTTING TOOLS CUTTING SEVERING
Information Patent Application
ILLUMINATION SYSTEM FOR ILLUMINATING A MASK IN A MICROLITHOGRAPHIC...
- Publication number 20180335702
- Publication date Nov 22, 2018
- Carl Zeiss SMT GMBH
- Erich Schubert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...
- Publication number 20180246415
- Publication date Aug 30, 2018
- Carl Zeiss SMT GMBH
- Stefan Xalter
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
ILLUMINATION SYSTEM FOR ILLUMINATING A MASK IN A MICROLITHOGRAPHIC...
- Publication number 20170351183
- Publication date Dec 7, 2017
- Carl Zeiss SMT GMBH
- Erich Schubert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...
- Publication number 20160266502
- Publication date Sep 15, 2016
- Carl Zeiss SMT GMBH
- Stefan Xalter
- G01 - MEASURING TESTING
Information Patent Application
ILLUMINATION SYSTEM FOR ILLUMINATING A MASK IN A MICROLITHOGRAPHIC...
- Publication number 20160187789
- Publication date Jun 30, 2016
- Carl Zeiss SMT GMBH
- Erich Schubert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...
- Publication number 20160077446
- Publication date Mar 17, 2016
- Carl Zeiss SMT GMBH
- Johannes Wangler
- G02 - OPTICS
Information Patent Application
METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...
- Publication number 20150300807
- Publication date Oct 22, 2015
- Carl Zeiss SMT GMBH
- Stefan Xalter
- G01 - MEASURING TESTING
Information Patent Application
ILLUMINATION SYSTEM HAVING A BEAM DEFLECTION ARRAY FOR ILLUMINATING...
- Publication number 20150185621
- Publication date Jul 2, 2015
- Carl Zeiss SMT GMBH
- Markus Deguenther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS HAVING A MULTI-MIRR...
- Publication number 20150177623
- Publication date Jun 25, 2015
- Carl Zeiss SMT GMBH
- Michael Layh
- G02 - OPTICS
Information Patent Application
ARRANGEMENT OF A MIRROR
- Publication number 20140240686
- Publication date Aug 28, 2014
- Johannes Ruoff
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...
- Publication number 20140233006
- Publication date Aug 21, 2014
- Stefan Xalter
- G02 - OPTICS
Information Patent Application
METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...
- Publication number 20140226141
- Publication date Aug 14, 2014
- Carl Zeiss SMT GMBH
- Stefan Xalter
- G02 - OPTICS
Information Patent Application
MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
- Publication number 20140211188
- Publication date Jul 31, 2014
- Carl Zeiss SMT GMBH
- Michael Layh
- G02 - OPTICS
Information Patent Application
MICROLITHOGRAPHIC ILLUMINATION SYSTEM
- Publication number 20140176930
- Publication date Jun 26, 2014
- Carl Zeiss SMT GMBH
- Markus Deguenther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR MEASURING AN OPTICAL SYSTEM
- Publication number 20130271749
- Publication date Oct 17, 2013
- Thomas KORB
- G01 - MEASURING TESTING
Information Patent Application
ILLUMINATION SYSTEM FOR ILLUMINATING A MASK IN A MICROLITHOGRAPHIC...
- Publication number 20130250264
- Publication date Sep 26, 2013
- Carl Zeiss SMT GMBH
- Erich Schubert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illumination optical unit with a movable filter element
- Publication number 20130176546
- Publication date Jul 11, 2013
- Carl Zeiss SMT GMBH
- Michael Layh
- F21 - LIGHTING
Information Patent Application
ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...
- Publication number 20130148092
- Publication date Jun 13, 2013
- Carl Zeiss SMT GMBH
- Johannes Wangler
- G02 - OPTICS
Information Patent Application
MICROLITHOGRAPHY ILLUMINATION OPTICAL SYSTEM AND MICROLITHOGRAPHY P...
- Publication number 20130077076
- Publication date Mar 28, 2013
- Carl Zeiss SMT GMBH
- Michael Patra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION SYSTEM AND PROJECTION OBJECTIVE OF A MASK INSPECTION A...
- Publication number 20130038850
- Publication date Feb 14, 2013
- CARL ZEISS SMT GMBH
- Heiko Feldmann
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...
- Publication number 20120293784
- Publication date Nov 22, 2012
- Carl Zeiss SMT GMBH
- Stefan Xalter
- G02 - OPTICS
Information Patent Application
METHOD FOR ADJUSTING AN ILLUMINATION SYSTEM OF A PROJECTION EXPOSUR...
- Publication number 20120242968
- Publication date Sep 27, 2012
- Carl Zeiss SMT GMBH
- Michael Layh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL SYSTEM FOR GENERATING A LIGHT BEAM FOR TREATING A SUBSTRATE
- Publication number 20120153189
- Publication date Jun 21, 2012
- CARL ZEISS LASER OPTICS GmbH
- Johannes Wangler
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
EUV COLLECTOR
- Publication number 20120050703
- Publication date Mar 1, 2012
- Carl Zeiss SMT GMBH
- Michael Layh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION SYSTEM FOR EUV MICROLITHOGRAPHY
- Publication number 20110177463
- Publication date Jul 21, 2011
- Carl Zeiss SMT GMBH
- Michael Layh
- G02 - OPTICS
Information Patent Application
ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHY PROJECTION EXPOSURE APPA...
- Publication number 20110102758
- Publication date May 5, 2011
- Carl Zeiss SMT GMBH
- Markus Schwab
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COMPONENT FOR SETTING A SCAN-INTEGRATED ILLUMINATION ENERGY IN AN O...
- Publication number 20110096317
- Publication date Apr 28, 2011
- Carl Zeiss SMT GMBH
- Ralf Stuetzle
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL INTEGRATOR FOR AN ILLUMINATION SYSTEM OF A MICROLITHOGRAPHI...
- Publication number 20110083542
- Publication date Apr 14, 2011
- Carl Zeiss SMT GMBH
- Oliver Wolf
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Michael Layh

Person

Patents Grantslast 30 patents

Confocal measuring apparatus for 3D measurement of an object surface

Illumination system having a beam deflection array for illuminating...

Illumination system for illuminating a mask in a microlithographic...

Microlithographic projection exposure apparatus having a multi-mirr...

Illumination system and projection objective of a mask inspection a...

Illumination system for illuminating a mask in a microlithographic...

Microlithography illumination optical system and microlithography p...

Method and device for monitoring multiple mirror arrays in an illum...

Arrangement of a mirror

Illumination system for illuminating a mask in a microlithographic...

Illumination system for a microlithographic projection exposure app...

Microlithographic illumination system

Illumination system for illuminating a mask in a microlithographic...

Component for setting a scan-integrated illumination energy in an o...

Illumination system for EUV microlithography

Method and device for monitoring multiple mirror arrays in an illum...

Illumination system for a microlithographic projection exposure app...

Method for adjusting an illumination system of a projection exposur...

Method and device for monitoring multiple mirror arrays in an illum...

Method and device for monitoring multiple mirror arrays in an illum...

Illumination system having a beam deflection array for illuminating...

EUV collector with cooling device

Method and device for monitoring multiple mirror arrays in an illum...

Microlithographic projection exposure apparatus

Method for measuring an optical system

Microlithographic projection exposure apparatus having a multi-mirr...

Microlithographic illumination system

Illumination system for a microlithography projection exposure appa...

Optical integrator for an illumination system of a microlithographi...

Illumination system for illuminating a mask in a microlithographic...

Patents Applicationslast 30 patents

Confocal measuring apparatus for 3D measurement of an object surface

METHOD FOR OPERATING A PROCESSING INSTALLATION WITH A MOVABLE PUNCH

ILLUMINATION SYSTEM FOR ILLUMINATING A MASK IN A MICROLITHOGRAPHIC...

METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...

ILLUMINATION SYSTEM FOR ILLUMINATING A MASK IN A MICROLITHOGRAPHIC...

METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...

ILLUMINATION SYSTEM FOR ILLUMINATING A MASK IN A MICROLITHOGRAPHIC...

ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...

METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...

ILLUMINATION SYSTEM HAVING A BEAM DEFLECTION ARRAY FOR ILLUMINATING...

MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS HAVING A MULTI-MIRR...

ARRANGEMENT OF A MIRROR

METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...

METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...

MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

MICROLITHOGRAPHIC ILLUMINATION SYSTEM

METHOD FOR MEASURING AN OPTICAL SYSTEM

ILLUMINATION SYSTEM FOR ILLUMINATING A MASK IN A MICROLITHOGRAPHIC...

Illumination optical unit with a movable filter element

ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...

MICROLITHOGRAPHY ILLUMINATION OPTICAL SYSTEM AND MICROLITHOGRAPHY P...

ILLUMINATION SYSTEM AND PROJECTION OBJECTIVE OF A MASK INSPECTION A...

METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUM...

METHOD FOR ADJUSTING AN ILLUMINATION SYSTEM OF A PROJECTION EXPOSUR...

OPTICAL SYSTEM FOR GENERATING A LIGHT BEAM FOR TREATING A SUBSTRATE

EUV COLLECTOR

ILLUMINATION SYSTEM FOR EUV MICROLITHOGRAPHY

ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHY PROJECTION EXPOSURE APPA...

COMPONENT FOR SETTING A SCAN-INTEGRATED ILLUMINATION ENERGY IN AN O...

OPTICAL INTEGRATOR FOR AN ILLUMINATION SYSTEM OF A MICROLITHOGRAPHI...