Michael Lill

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Aalen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Optical arrangement for immersion lithography with a hydrophobic co...
- Patent number 8,279,402
- Issue date Oct 2, 2012
- Carl Zeiss SMT GmbH
- Stephan Six
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection objective for immersion lithography
- Patent number 7,460,206
- Issue date Dec 2, 2008
- Carl Zeiss SMT AG
- Karl-Stefan Weissenrieder
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL ARRANGEMENT FOR IMMERSION LITHOGRAPHY WITH A HYDROPHOBIC CO...
- Publication number 20090233233
- Publication date Sep 17, 2009
- Carl Zeiss SMT AG
- Stephan SIX
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION OBJECTIVE FOR IMMERSION LITHOGRAPHY
- Publication number 20080297745
- Publication date Dec 4, 2008
- Carl Zeiss SMT AG
- Karl-Stefan WEISSENRIEDER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION OBJECTIVE FOR IMMERSION LITHOGRAPHY
- Publication number 20080291419
- Publication date Nov 27, 2008
- Carl Zeiss SMT AG
- Karl-Stefan Weissenrieder
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Projection objective for immersion lithography
- Publication number 20050225737
- Publication date Oct 13, 2005
- Carl Zeiss SMT AG
- Karl-Stefan Weissenrieder
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY