Michael LIU

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Saratoga, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Thermal processing chamber with low temperature control
- Patent number 10,948,353
- Issue date Mar 16, 2021
- Applied Materials, Inc.
- Lara Hawrylchak
- G01 - MEASURING TESTING
Information Patent Grant
Thermal cooling member with low temperature control
- Patent number 10,571,337
- Issue date Feb 25, 2020
- Applied Materials, Inc.
- Lara Hawrylchak
- G05 - CONTROLLING REGULATING
Information Patent Grant
Visual feedback for process control in RTP chambers
- Patent number 10,109,514
- Issue date Oct 23, 2018
- Applied Materials, Inc.
- Kim Vellore
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Visual feedback for process control in RTP chambers
- Patent number 9,735,034
- Issue date Aug 15, 2017
- Applied Materials, Inc.
- Kim Vellore
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for reducing the effect of contamination on a rapid therm...
- Patent number 9,514,969
- Issue date Dec 6, 2016
- Applied Materials, Inc.
- Aaron Miller
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
THERMAL PROCESSING CHAMBER WITH LOW TEMPERATURE CONTROL
- Publication number 20200149968
- Publication date May 14, 2020
- Applied Materials, Inc.
- Lara HAWRYLCHAK
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
THERMAL PROCESSING CHAMBER WITH LOW TEMPERATURE CONTROL
- Publication number 20180340832
- Publication date Nov 29, 2018
- Applied Materials, Inc.
- Lara HAWRYLCHAK
- G01 - MEASURING TESTING
Information Patent Application
VISUAL FEEDBACK FOR PROCESS CONTROL IN RTP CHAMBERS
- Publication number 20170345693
- Publication date Nov 30, 2017
- Applied Materials, Inc.
- Kim VELLORE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR DECREASING SUBSTRATE TEMPERATURE NON-UNIFORMITY
- Publication number 20160358789
- Publication date Dec 8, 2016
- Applied Materials, Inc.
- Aaron MILLER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR REDUCING THE EFFECT OF CONTAMINATION ON A RAPID THERM...
- Publication number 20150155190
- Publication date Jun 4, 2015
- Applied Materials, Inc.
- Aaron MILLER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VISUAL FEEDBACK FOR PROCESS CONTROL IN RTP CHAMBERS
- Publication number 20150041453
- Publication date Feb 12, 2015
- Applied Materials, Inc.
- Kim VELLORE
- H01 - BASIC ELECTRIC ELEMENTS