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Michael Loken
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Julich, DE
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last 30 patents
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Patent Grant
Method and device for producing extreme ultraviolet radiation and s...
Patent number
7,126,143
Issue date
Oct 24, 2006
Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung E.V.
Jürgen Klein
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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last 30 patents
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Method and device for producing extreme ultraviolet radiation and s...
Publication number
20040183037
Publication date
Sep 23, 2004
Jurgen Klein
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR