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Michael Lubbehusen
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Bruchkobel, DE
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last 30 patents
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Patent Grant
Device for the prevention of arcing in vacuum sputtering installations
Patent number
6,440,281
Issue date
Aug 27, 2002
Unaxis Deutschland Holding GmbH
Johann Stürmer
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Process for coating substrates by means of a magnetron cathode
Patent number
5,182,001
Issue date
Jan 26, 1993
Leybold Aktiengesellschaft
Wolf E. Fritsche
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Apparatus for coating substrates by means of a magnetron cathode
Patent number
5,069,772
Issue date
Dec 3, 1991
Leybold Aktiengesellschaft
Wolf-Eckhart Fritsche
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...