Michael Marinus Anna STEUR

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Eindhoven, NL

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Patents Grantslast 30 patents

Information Patent Grant
Object table, a stage apparatus and a lithographic apparatus
- Patent number 11,880,144
- Issue date Jan 23, 2024
- ASML Netherlands B.V.
- Sander Jeroen Hermanussen
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
OBJECT TABLE, A STAGE APPARATUS AND A LITHOGRAPHIC APPARATUS
- Publication number 20240142885
- Publication date May 2, 2024
- ASML NETHERLANDS B.V.
- Sander Jeroen HERMANUSSEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OBJECT TABLE, STAGE APPARATUS, HOLDING METHOD AND LITHOGRAPHIC APPA...
- Publication number 20230400783
- Publication date Dec 14, 2023
- ASML NETHERLANDS B.V.
- Michael Marinus Anna STEUR
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF MANUFACTURING A SUBSTRATE SUPPORT FOR A LITHOGRAPHIC APPA...
- Publication number 20230004092
- Publication date Jan 5, 2023
- ASML NETHERLANDS B.V.
- Michael Marinus Anna STEUR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OBJECT TABLE, A STAGE APPARATUS AND A LITHOGRAPHIC APPARATUS
- Publication number 20220197155
- Publication date Jun 23, 2022
- ASML NETHERLANDS B.V.
- Sander Jeroen HERMANUSSEN
- H01 - BASIC ELECTRIC ELEMENTS