Michael Maurer

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Ulm, DE

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Patents Grantslast 30 patents

Information Patent Grant
Rapid thermal processing (RTP) system with rotating substrate
- Patent number 5,965,047
- Issue date Oct 12, 1999
- Steag AST
- Werner Blersch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for improved temperature control in rapid ther...
- Patent number 5,841,110
- Issue date Nov 24, 1998
- Steag-Ast GmbH
- Zsolt Nenyei
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR