Michael Muehlbeyer

Person

Aalen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Diaphragm changing device
- Patent number 10,139,733
- Issue date Nov 27, 2018
- Carl Zeiss SMT GmbH
- Hermann Bieg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imaging device in a projection exposure facility
- Patent number 8,514,371
- Issue date Aug 20, 2013
- Carl Zeiss SMT GmbH
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for manipulation of an optical element
- Patent number 8,179,621
- Issue date May 15, 2012
- Carl Zeiss SMT GmbH
- Michael Muehlbeyer
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Diaphragm changing device
- Patent number 8,089,707
- Issue date Jan 3, 2012
- Carl Zeiss SMT GmbH
- Hermann Bieg
- G02 - OPTICS
Information Patent Grant
Device consisting of at least one optical element
- Patent number 7,995,884
- Issue date Aug 9, 2011
- Carl Zeiss SMT GmbH
- Yim-Bun Patrick Kwan
- G02 - OPTICS
Information Patent Grant
Imaging device in a projection exposure facility
- Patent number 7,961,294
- Issue date Jun 14, 2011
- Carl Zeiss SMT GmbH
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Diaphragm changing device
- Patent number 7,684,125
- Issue date Mar 23, 2010
- Carl Zeiss SMT AG
- Hermann Bieg
- G02 - OPTICS
Information Patent Grant
Imaging device in a projection exposure machine
- Patent number 7,486,382
- Issue date Feb 3, 2009
- Carl Zeiss SMT AG
- Stephan Back
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imaging device in a projection exposure facility
- Patent number 7,304,717
- Issue date Dec 4, 2007
- Carl Zelss SMT AG
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System for damping oscillations
- Patent number 6,897,599
- Issue date May 24, 2005
- Carl Zeiss SMT AG
- Franz Sorg
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Optical system with isolated measuring structure
- Patent number 6,864,988
- Issue date Mar 8, 2005
- Carl Zeiss Semiconductor Manufacturing Technologies AG
- Albrecht Hof
- G02 - OPTICS
Information Patent Grant
Oscillation damping system
- Patent number 6,700,715
- Issue date Mar 2, 2004
- Carl Zeiss SMT AG
- Franz Sorg
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Optical imaging device, in particular lens system, with at least on...
- Patent number 6,445,510
- Issue date Sep 3, 2002
- Carl-Zeiss-Stiftung
- Karlheinz Schuster
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
DIAPHRAGM CHANGING DEVICE
- Publication number 20160282724
- Publication date Sep 29, 2016
- Carl Zeiss SMT GMBH
- Hermann Bieg
- G02 - OPTICS
Information Patent Application
DIAPHRAGM CHANGING DEVICE
- Publication number 20120075611
- Publication date Mar 29, 2012
- Carl Zeiss SMT GMBH
- Hermann Bieg
- G02 - OPTICS
Information Patent Application
APPARATUS FOR MANIPULATION OF AN OPTICAL ELEMENT
- Publication number 20100157270
- Publication date Jun 24, 2010
- Carl Zeiss SMT AG
- Michael Muehlbeyer
- G02 - OPTICS
Information Patent Application
DIAPHRAGM CHANGING DEVICE
- Publication number 20100134777
- Publication date Jun 3, 2010
- Carl Zeiss SMT AG
- Hermann Bieg
- G02 - OPTICS
Information Patent Application
Imaging Device in a Projection Exposure Machine
- Publication number 20090141258
- Publication date Jun 4, 2009
- Carl Zeiss SMT AG
- Stephan Back
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS FOR MANIPULATION OF AN OPTICAL ELEMENT
- Publication number 20090050776
- Publication date Feb 26, 2009
- Carl Zeiss SMT AG
- Michael Muehlbeyer
- G02 - OPTICS
Information Patent Application
IMAGING DEVICE IN A PROJECTION EXPOSURE FACILITY
- Publication number 20090040487
- Publication date Feb 12, 2009
- Carl Zeiss SMT AG
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus for manipulation of an optical element
- Publication number 20070052301
- Publication date Mar 8, 2007
- Michael Muehlbeyer
- G02 - OPTICS
Information Patent Application
Imaging device in a projection exposure machine
- Publication number 20060164619
- Publication date Jul 27, 2006
- Carl Zeiss SMT AG
- Stephan Back
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for the targeted deformation of an optical element
- Publication number 20050280910
- Publication date Dec 22, 2005
- Jean Noel Fehr
- G02 - OPTICS
Information Patent Application
Optical system with a plurality of optical elements
- Publication number 20030010902
- Publication date Jan 16, 2003
- CARL-ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
- Albrecht Hof
- G02 - OPTICS
Information Patent Application
System for damping oscillations
- Publication number 20020109437
- Publication date Aug 15, 2002
- Franz Sorg
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Oscillation damping system
- Publication number 20020075574
- Publication date Jun 20, 2002
- Franz Sorg
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Michael Muehlbeyer

Person

Patents Grantslast 30 patents

Diaphragm changing device

Imaging device in a projection exposure facility

Apparatus for manipulation of an optical element

Diaphragm changing device

Device consisting of at least one optical element

Imaging device in a projection exposure facility

Diaphragm changing device

Imaging device in a projection exposure machine

Imaging device in a projection exposure facility

System for damping oscillations

Optical system with isolated measuring structure

Oscillation damping system

Optical imaging device, in particular lens system, with at least on...

Patents Applicationslast 30 patents

DIAPHRAGM CHANGING DEVICE

DIAPHRAGM CHANGING DEVICE

APPARATUS FOR MANIPULATION OF AN OPTICAL ELEMENT

DIAPHRAGM CHANGING DEVICE

Imaging Device in a Projection Exposure Machine

APPARATUS FOR MANIPULATION OF AN OPTICAL ELEMENT

IMAGING DEVICE IN A PROJECTION EXPOSURE FACILITY

Apparatus for manipulation of an optical element

Imaging device in a projection exposure machine

Method for the targeted deformation of an optical element

Optical system with a plurality of optical elements

System for damping oscillations

Oscillation damping system