Michael Nam

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
System and apparatus to facilitate physical vapor deposition to mod...
- Patent number 8,956,516
- Issue date Feb 17, 2015
- Semicat, Inc.
- Jin Hyun Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods to fabricate non-metal films on semiconductor substrates us...
- Patent number 8,936,703
- Issue date Jan 20, 2015
- Semicat, Inc.
- Jin Hyun Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputter deposited barrier layers
- Patent number 6,271,592
- Issue date Aug 7, 2001
- Applied Materials, Inc.
- Edwin Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Oxygen enhancement of ion metal plasma (IMP) sputter deposited barr...
- Patent number 5,985,759
- Issue date Nov 16, 1999
- Applied Materials, Inc.
- Edwin Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM AND APPARATUS TO FACILITATE PHYSICAL VAPOR DEPOSITION TO MOD...
- Publication number 20160013035
- Publication date Jan 14, 2016
- Semicat, Inc.
- Jin Hyun Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS TO FABRICATE NON-METAL FILMS ON SEMICONDUCTOR SUBSTRATES US...
- Publication number 20150372231
- Publication date Dec 24, 2015
- Semicat, Inc.
- Jin Hyun Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE CONTROL OF SEMICONDUCTOR PROCESSING CHAMBERS
- Publication number 20140069130
- Publication date Mar 13, 2014
- Semicat, Inc.
- Kyle Petersen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROL OF SEMICONDUCTOR PROCESSING CHAMBERS BY MODULAT...
- Publication number 20140069334
- Publication date Mar 13, 2014
- Semicat, Inc.
- Kyle Petersen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND APPARATUS TO FACILITATE PHYSICAL VAPOR DEPOSITION TO MOD...
- Publication number 20110048934
- Publication date Mar 3, 2011
- Semicat, Inc.
- Jin Hyun Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS TO FABRICATE NON-METAL FILMS ON SEMICONDUCTOR SUBSTRATES US...
- Publication number 20110048928
- Publication date Mar 3, 2011
- Semicat, Inc.
- Jin Hyun Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Michael Nam

Person

Patents Grantslast 30 patents

System and apparatus to facilitate physical vapor deposition to mod...

Methods to fabricate non-metal films on semiconductor substrates us...

Sputter deposited barrier layers

Oxygen enhancement of ion metal plasma (IMP) sputter deposited barr...

Patents Applicationslast 30 patents

SYSTEM AND APPARATUS TO FACILITATE PHYSICAL VAPOR DEPOSITION TO MOD...

METHODS TO FABRICATE NON-METAL FILMS ON SEMICONDUCTOR SUBSTRATES US...

TEMPERATURE CONTROL OF SEMICONDUCTOR PROCESSING CHAMBERS

TEMPERATURE CONTROL OF SEMICONDUCTOR PROCESSING CHAMBERS BY MODULAT...

SYSTEM AND APPARATUS TO FACILITATE PHYSICAL VAPOR DEPOSITION TO MOD...

METHODS TO FABRICATE NON-METAL FILMS ON SEMICONDUCTOR SUBSTRATES US...