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Michael Nordin
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San Jose, CA, US
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last 30 patents
Information
Patent Grant
Optimized low energy / high productivity deposition system
Patent number
11,024,531
Issue date
Jun 1, 2021
Lam Research Corporation
Michael Nordin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Closed loop temperature heat up and control utilizing wafer-to-heat...
Patent number
8,920,162
Issue date
Dec 30, 2014
Novellus Systems, Inc.
Michael Nordin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Load lock design for rapid wafer heating
Patent number
8,273,670
Issue date
Sep 25, 2012
Novellus Systems, Inc.
Michael Rivkin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Closed loop temperature heat up and control utilizing wafer-to-heat...
Patent number
8,052,419
Issue date
Nov 8, 2011
Novellus Systems, Inc.
Michael Nordin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Load lock design for rapid wafer heating
Patent number
7,960,297
Issue date
Jun 14, 2011
Novellus Systems, Inc.
Michael Rivkin
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
MECHANICAL INDEXER FOR MULTI-STATION PROCESS MODULE
Publication number
20210320029
Publication date
Oct 14, 2021
LAM RESEARCH CORPORATION
Michael NORDIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REDUCED FOOTPRINT WAFER HANDLING PLATFORM
Publication number
20210272832
Publication date
Sep 2, 2021
LAM RESEARCH CORPORATION
Christopher W. Burkhart
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OPTIMIZED LOW ENERGY / HIGH PRODUCTIVITY DEPOSITION SYSTEM
Publication number
20180211864
Publication date
Jul 26, 2018
LAM RESEARCH CORPORATION
Michael Nordin
H01 - BASIC ELECTRIC ELEMENTS