Michael Offenberg

Person

Kirchentellinsfurt, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Micromechanical sensor element, method for manufacturing a micromec...
- Patent number 8,627,719
- Issue date Jan 14, 2014
- Robert Bosch GmbH
- Michael Offenberg
- G01 - MEASURING TESTING
Information Patent Grant
Sensor with at least one micromechanical structure, and method for...
- Patent number 7,273,764
- Issue date Sep 25, 2007
- Robert Bosch GmbH
- Frank Reichenbach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component and corresponding production method
- Patent number 7,259,436
- Issue date Aug 21, 2007
- Robert Bosch GmbH
- Michael Offenberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor with at least one micromechanical structure and method for p...
- Patent number 6,936,902
- Issue date Aug 30, 2005
- Robert Bosch GmbH
- Frank Reichenbach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing micromechanical surface structures by vapor...
- Patent number 6,558,559
- Issue date May 6, 2003
- Robert Bosch GmbH
- Volker Becker
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a micromechanical component
- Patent number 6,368,885
- Issue date Apr 9, 2002
- Robert Bosch GmbH
- Michael Offenberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical sensor and method for the manufacture thereof
- Patent number 6,318,175
- Issue date Nov 20, 2001
- Robert Bosch GmbH
- Joerg Muchow
- G01 - MEASURING TESTING
Information Patent Grant
Method for fabricating a micromechanical component
- Patent number 6,268,232
- Issue date Jul 31, 2001
- Robert Bosch GmbH
- Helmut Skapa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for fabricating micromechanical components
- Patent number 6,251,699
- Issue date Jun 26, 2001
- Robert Bosch GmbH
- Matthias Fuertsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for producing a speed of rotation coriolis sensor
- Patent number 6,214,243
- Issue date Apr 10, 2001
- Robert Bosch GmbH
- Horst Muenzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method for micromechanical component
- Patent number 6,187,607
- Issue date Feb 13, 2001
- Robert Bosch GmbH
- Michael Offenberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bonding pad structure and method for manufacturing the bonding pad...
- Patent number 6,140,709
- Issue date Oct 31, 2000
- Robert Bosch GmbH
- Horst Muenzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a rate-of-rotation sensor
- Patent number 6,117,701
- Issue date Sep 12, 2000
- Robert Bosch GmbH
- Nicholas Buchan
- G01 - MEASURING TESTING
Information Patent Grant
Micromechanical sensor including a single-crystal silicon support
- Patent number 6,076,404
- Issue date Jun 20, 2000
- Robert Bosch GmbH
- Joerg Muchow
- G01 - MEASURING TESTING
Information Patent Grant
Acceleration sensor
- Patent number 6,055,858
- Issue date May 2, 2000
- Robert Bosch GmbH
- Horst Muenzel
- G01 - MEASURING TESTING
Information Patent Grant
Method for manufacturing a sensor
- Patent number 6,030,850
- Issue date Feb 29, 2000
- Robert Bosch GmbH
- Juergen Kurle
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component having closely spaced apart anchoring are...
- Patent number 5,983,721
- Issue date Nov 16, 1999
- Robert Bosch GmbH
- Peter Sulzberger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Acceleration sensor
- Patent number 5,959,208
- Issue date Sep 28, 1999
- GmbH; Robert Bosch
- Horst Muenzel
- G01 - MEASURING TESTING
Information Patent Grant
Method of producing acceleration sensors
- Patent number 5,937,275
- Issue date Aug 10, 1999
- Robert Bosch GmbH
- Horst Munzel
- G01 - MEASURING TESTING
Information Patent Grant
Method for manufacturing an accelerometer sensor of crystalline mat...
- Patent number 5,792,675
- Issue date Aug 11, 1998
- Michael Offenberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor and method for manufacturing a sensor
- Patent number 5,756,901
- Issue date May 26, 1998
- Robert Bosch GmbH
- Juergen Kurle
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for manufacturing a sensor
- Patent number 5,723,353
- Issue date Mar 3, 1998
- Robert Bosch GmbH
- Horst Muenzel
- G01 - MEASURING TESTING
Information Patent Grant
Process for producing surface micromechanical structures
- Patent number 5,683,591
- Issue date Nov 4, 1997
- Robert Bosch GmbH
- Michael Offenberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Suspension for micromechanical structure and micromechanical accele...
- Patent number 5,646,347
- Issue date Jul 8, 1997
- Robert Bosch GmbH
- Kurt Weiblen
- G01 - MEASURING TESTING
Information Patent Grant
Sensor comprising multilayer substrate
- Patent number 5,631,422
- Issue date May 20, 1997
- Robert Bosch GmbH
- Peter Sulzberger
- G01 - MEASURING TESTING
Information Patent Grant
Acceleration sensor
- Patent number 5,627,317
- Issue date May 6, 1997
- Robert Bosch GmbH
- Michael Offenberg
- G01 - MEASURING TESTING
Information Patent Grant
Method of manufacturing sensor
- Patent number 5,616,523
- Issue date Apr 1, 1997
- Robert Bosch GmbH
- Gerhard Benz
- G01 - MEASURING TESTING
Information Patent Grant
Method of fabricating a micromechanical sensor
- Patent number 5,616,514
- Issue date Apr 1, 1997
- Robert Bosch GmbH
- Joerg Muchow
- G01 - MEASURING TESTING
Information Patent Grant
Accelerometer sensor of crystalline material and method for manufac...
- Patent number 5,578,755
- Issue date Nov 26, 1996
- Robert Bosch GmbH
- Michael Offenberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Acceleration sensor
- Patent number 5,574,222
- Issue date Nov 12, 1996
- Robert Bosch GmbH
- Michael Offenberg
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Micromechanical sensor element, method for manufacturing a micromec...
- Publication number 20100011860
- Publication date Jan 21, 2010
- Michael Offenberg
- G01 - MEASURING TESTING
Information Patent Application
Sensor with at least one micromechanical structure, and method for...
- Publication number 20050230708
- Publication date Oct 20, 2005
- Frank Reichenbach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Sensor with at least one micromechanical structure and method for p...
- Publication number 20040065932
- Publication date Apr 8, 2004
- Frank Reichenbach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromechanical component and corresponding production method
- Publication number 20030049878
- Publication date Mar 13, 2003
- Michael Offenberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Michael Offenberg

Person

Patents Grantslast 30 patents

Micromechanical sensor element, method for manufacturing a micromec...

Sensor with at least one micromechanical structure, and method for...

Micromechanical component and corresponding production method

Sensor with at least one micromechanical structure and method for p...

Method of manufacturing micromechanical surface structures by vapor...

Method for manufacturing a micromechanical component

Micromechanical sensor and method for the manufacture thereof

Method for fabricating a micromechanical component

Method for fabricating micromechanical components

Process for producing a speed of rotation coriolis sensor

Manufacturing method for micromechanical component

Bonding pad structure and method for manufacturing the bonding pad...

Method for manufacturing a rate-of-rotation sensor

Micromechanical sensor including a single-crystal silicon support

Acceleration sensor

Method for manufacturing a sensor

Micromechanical component having closely spaced apart anchoring are...

Acceleration sensor

Method of producing acceleration sensors

Method for manufacturing an accelerometer sensor of crystalline mat...

Sensor and method for manufacturing a sensor

Process for manufacturing a sensor

Process for producing surface micromechanical structures

Suspension for micromechanical structure and micromechanical accele...

Sensor comprising multilayer substrate

Acceleration sensor

Method of manufacturing sensor

Method of fabricating a micromechanical sensor

Accelerometer sensor of crystalline material and method for manufac...

Acceleration sensor

Patents Applicationslast 30 patents

Micromechanical sensor element, method for manufacturing a micromec...

Sensor with at least one micromechanical structure, and method for...

Sensor with at least one micromechanical structure and method for p...

Micromechanical component and corresponding production method