Michael Perry

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Thomaston, CT, US

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Patents Grantslast 30 patents

Information Patent Grant
Method to manufacture nano ridges in hard ceramic coatings
- Patent number 12,111,581
- Issue date Oct 8, 2024
- ASML Holding N.V.
- Mehmet Ali Akbas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Burls with altered surface topography for holding an object in lith...
- Patent number 11,270,906
- Issue date Mar 8, 2022
- ASML Holding N.V.
- Mehmet Ali Akbas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
EUV reticle substrates with high thermal conductivity
- Patent number 8,736,810
- Issue date May 27, 2014
- ASML Holding N.V.
- Ronald A. Wilklow
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
METHOD TO MANUFACTURE NANO RIDGES IN HARD CERAMIC COATINGS
- Publication number 20240369947
- Publication date Nov 7, 2024
- ASML Holding N.V.
- Mehmet Ali AKBAS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
A METHOD TO MANUFACTURE NANO RIDGES IN HARD CERAMIC COATINGS
- Publication number 20210405539
- Publication date Dec 30, 2021
- ASML Holding N.V.
- Mehmet Ali AKBAS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BURLS WITH ALTERED SURFACE TOPOGRAPHY FOR HOLDING AN OBJECT IN LITH...
- Publication number 20210202293
- Publication date Jul 1, 2021
- ASML Holding N.V.
- Mehmet Ali AKBAS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EUV Reticle Substrates With High Thermal Conductivity
- Publication number 20110116068
- Publication date May 19, 2011
- EUV RETICLE SUBSTRATES WITH HIGH THERMAL CONDUCTIV
- Ronald A. Wilklow
- B82 - NANO-TECHNOLOGY