Michael Pharand

Follow

Person

Los Gatos, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Low-cost electrostatic clamp with fast de-clamp time
- Patent number 7,714,406
- Issue date May 11, 2010
- Axcelis Technologies, Inc.
- Marvin Raymond LaFontaine
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER

Patents Applicationslast 30 patents

Information Patent Application
LOW-COST ELECTROSTATIC CLAMP WITH FAST DE-CLAMP TIME
- Publication number 20080100984
- Publication date May 1, 2008
- Marvin Raymond LaFontaine
- H01 - BASIC ELECTRIC ELEMENTS