Michael PUGGL

Person

VILLACH, AT

People

Patents Grantslast 30 patents

Information Patent Grant
Device for holding wafer shaped articles
- Patent number 9,130,002
- Issue date Sep 8, 2015
- Lam Research AG
- Dieter Frank
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for liquid treatment of wafer shaped articles
- Patent number 8,997,764
- Issue date Apr 7, 2015
- Lam Research AG
- Michael Puggl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for wet treatment of plate-like articles
- Patent number 8,945,341
- Issue date Feb 3, 2015
- Lam Research AG
- Masaichiro Ken Matsushita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for wet treatment of disc-like articles
- Patent number 8,821,681
- Issue date Sep 2, 2014
- Lam Research AG
- Michael Puggl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and process for liquid treatment of a wafer shaped article
- Patent number 8,596,623
- Issue date Dec 3, 2013
- Lam Research AG
- Dieter Frank
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR PROCESSING A WAFER
- Publication number 20230360952
- Publication date Nov 9, 2023
- LAM RESEARCH AG
- Michael BRUGGER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUAL MODE CHAMBER FOR PROCESSING WAFER-SHAPED ARTICLES
- Publication number 20160376702
- Publication date Dec 29, 2016
- LAM RESEARCH AG
- Karl-Heinz HOHENWARTER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES
- Publication number 20140041803
- Publication date Feb 13, 2014
- LAM RESEARCH AG
- Takehito KOSHIZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR LIQUID TREATMENT OF WAFER-SHAPED ARTICLES
- Publication number 20140026926
- Publication date Jan 30, 2014
- LAM RESEARCH AG
- Christoph SEMMELROCK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE FOR WET TREATMENT OF PLATE-LIKE ARTICLES
- Publication number 20130048607
- Publication date Feb 28, 2013
- LAM RESEARCH AG
- Masaichiro Ken MATSUSHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES
- Publication number 20120298149
- Publication date Nov 29, 2012
- LAM RESEARCH AG
- Michael PUGGL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND PROCESS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES
- Publication number 20120286481
- Publication date Nov 15, 2012
- LAM RESEARCH AG
- Michael PUGGL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR HOLDING WAFER SHAPED ARTICLES
- Publication number 20110272874
- Publication date Nov 10, 2011
- LAM RESEARCH AG
- Dieter FRANK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND PROCESS FOR LIQUID TREATMENT OF A WAFER SHAPED ARTICLE
- Publication number 20110151675
- Publication date Jun 23, 2011
- LAM RESEARCH AG
- Dieter FRANK
- H01 - BASIC ELECTRIC ELEMENTS

Michael PUGGL

Person

Patents Grantslast 30 patents

Device for holding wafer shaped articles

Method and apparatus for liquid treatment of wafer shaped articles

Method and device for wet treatment of plate-like articles

Apparatus and method for wet treatment of disc-like articles

Device and process for liquid treatment of a wafer shaped article

Patents Applicationslast 30 patents

APPARATUS FOR PROCESSING A WAFER

DUAL MODE CHAMBER FOR PROCESSING WAFER-SHAPED ARTICLES

METHOD AND APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES

METHOD AND APPARATUS FOR LIQUID TREATMENT OF WAFER-SHAPED ARTICLES

METHOD AND DEVICE FOR WET TREATMENT OF PLATE-LIKE ARTICLES

METHOD AND APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES

DEVICE AND PROCESS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES

DEVICE FOR HOLDING WAFER SHAPED ARTICLES

DEVICE AND PROCESS FOR LIQUID TREATMENT OF A WAFER SHAPED ARTICLE