Michael R. Biche

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Union City, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method of processing a substrate in a photolithography system utili...
- Patent number 5,935,768
- Issue date Aug 10, 1999
- Semiconductor Systems, Inc.
- Michael R. Biche
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for curing photoresist
- Patent number 5,766,824
- Issue date Jun 16, 1998
- Semiconductor Systems, Inc.
- William T. Batchelder
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Clustered photolithography system
- Patent number 5,651,823
- Issue date Jul 29, 1997
- Semiconductor Systems, Inc.
- Michael L. Parodi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Thermal process module for substrate coat/develop system
- Patent number 5,553,994
- Issue date Sep 10, 1996
- Semiconductor Systems, Inc.
- Michael R. Biche
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cassette input/output unit for semiconductor processing system
- Patent number 5,443,348
- Issue date Aug 22, 1995
- Semiconductor Systems, Inc.
- Michael R. Biche
- H01 - BASIC ELECTRIC ELEMENTS