Michael R. Sogard

Person

Menlo Park, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and methods for measuring thermally induced reticle disto...
- Patent number 11,313,758
- Issue date Apr 26, 2022
- Nikon Corporation
- Michael Sogard
- G01 - MEASURING TESTING
Information Patent Grant
Illumination device for optimizing polarization in an illumination...
- Patent number 10,690,317
- Issue date Jun 23, 2020
- Nikon Corporation
- Daniel Gene Smith
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and methods for measuring thermally induced reticle disto...
- Patent number 10,612,997
- Issue date Apr 7, 2020
- Nikon Corporation
- Michael Sogard
- G01 - MEASURING TESTING
Information Patent Grant
Fluid gauges comprising multiple differential pressure sensors
- Patent number 10,466,045
- Issue date Nov 5, 2019
- Nikon Corporation
- Michael Sogard
- G01 - MEASURING TESTING
Information Patent Grant
Thermal regulation of vibration-sensitive objects with conduit circ...
- Patent number 10,054,754
- Issue date Aug 21, 2018
- Nikon Corporation
- Michael R. Sogard
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Environmental system including vacuum scavenge for an immersion lit...
- Patent number 9,977,350
- Issue date May 22, 2018
- Nikon Corporation
- Andrew J. Hazelton
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and methods for measuring thermally induced reticle disto...
- Patent number 9,976,930
- Issue date May 22, 2018
- Nikon Corporation
- Michael Sogard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination device for optimizing polarization in an illumination...
- Patent number 9,732,934
- Issue date Aug 15, 2017
- Nikon Corporation
- Daniel Gene Smith
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Environmental system including vacuum scavenge for an immersion lit...
- Patent number 9,658,537
- Issue date May 23, 2017
- Nikon Corporation
- Andrew J. Hazelton
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position-measurement systems
- Patent number 9,529,282
- Issue date Dec 27, 2016
- Nikon Corporation
- Michael R. Sogard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and methods for reducing autofocus error
- Patent number 9,513,460
- Issue date Dec 6, 2016
- Nikon Corporation
- Michael Sogard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and methods for measuring thermally induced reticle disto...
- Patent number 9,423,704
- Issue date Aug 23, 2016
- Nikon Corporation
- Michael Sogard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods and devices for reducing errors in Goos-Hänchen corrections...
- Patent number 9,335,159
- Issue date May 10, 2016
- Nikon Corporation
- Michael Sogard
- G01 - MEASURING TESTING
Information Patent Grant
Environmental system including vacuum scavenge for an immersion lit...
- Patent number 9,244,362
- Issue date Jan 26, 2016
- Nikon Corporation
- Andrew J. Hazelton
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Environmental system including a transport region for an immersion...
- Patent number 9,244,363
- Issue date Jan 26, 2016
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for compensating instability in an autofocus system
- Patent number 9,097,851
- Issue date Aug 4, 2015
- Nikon Corporation
- Eric Peter Goodwin
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and methods for measuring thermally induced reticle disto...
- Patent number 8,994,918
- Issue date Mar 31, 2015
- Nikon Corporation
- Michael Sogard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods and devices for hybridization and binding assays using ther...
- Patent number 8,852,858
- Issue date Oct 7, 2014
- Nikon Research Corporation of America
- Michael Sogard
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Grant
Methods and devices for reducing errors in Goos-Hänchen corrections...
- Patent number 8,842,296
- Issue date Sep 23, 2014
- Nikon Corporation
- Michael Sogard
- G01 - MEASURING TESTING
Information Patent Grant
Environmental system including vacuum scavenge for an immersion lit...
- Patent number 8,836,914
- Issue date Sep 16, 2014
- Nikon Corporation
- Andrew J. Hazelton
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Environmental system including vacuum scavenge for an immersion lit...
- Patent number 8,810,768
- Issue date Aug 19, 2014
- Nikon Corporation
- Andrew J. Hazelton
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Temperature-controlled holding devices for planar articles
- Patent number 8,767,174
- Issue date Jul 1, 2014
- Nikon Corporation
- Michael R. Sogard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fluid gauge with multiple reference gaps
- Patent number 8,717,542
- Issue date May 6, 2014
- Nikon Corporation
- Michael R. Sogard
- G01 - MEASURING TESTING
Information Patent Grant
Stroboscopic light source for a transmitter of a large scale metrol...
- Patent number 8,711,335
- Issue date Apr 29, 2014
- Nikon Corporation
- Michael Sogard
- G01 - MEASURING TESTING
Information Patent Grant
Hybrid electrostatic chuck
- Patent number 8,593,779
- Issue date Nov 26, 2013
- Nikon Corporation
- Michael R. Sogard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Environmental system including vacuum scavenge for an immersion lit...
- Patent number 8,456,610
- Issue date Jun 4, 2013
- Nikon Corporation
- Andrew J. Hazelton
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Dynamic fluid control system for immersion lithography
- Patent number 8,194,229
- Issue date Jun 5, 2012
- Nikon Corporation
- Michael Sogard
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Environmental system including vacuum scavenge for an immersion lit...
- Patent number 8,089,610
- Issue date Jan 3, 2012
- Nikon Corporation
- Andrew J. Hazelton
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Environmental system including vacuum scavenge for an immersion lit...
- Patent number 7,932,995
- Issue date Apr 26, 2011
- Nikon Corporation
- Andrew J. Hazelton
Information Patent Grant
Measurement of EUV intensity
- Patent number 7,916,274
- Issue date Mar 29, 2011
- Nikon Corporation
- Michael Sogard
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHODS FOR MEASURING THERMALLY INDUCED RETICLE DISTO...
- Publication number 20200209104
- Publication date Jul 2, 2020
- Nikon Corporation
- Michael Sogard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
THERMAL REGULATION OF VIBRATION-SENSITIVE OBJECTS WITH CONDUIT CIRC...
- Publication number 20180335597
- Publication date Nov 22, 2018
- Nikon Corporation
- Michael R. Sogard
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
APPARATUS AND METHODS FOR MEASURING THERMALLY INDUCED RETICLE DISTO...
- Publication number 20180266916
- Publication date Sep 20, 2018
- Nikon Corporation
- Michael Sogard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ENVIRONMENTAL SYSTEM INCLUDING VACUUM SCAVENGE FOR AN IMMERSION LIT...
- Publication number 20180259860
- Publication date Sep 13, 2018
- Nikon Corporation
- Andrew J. HAZELTON
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION DEVICE FOR OPTIMIZING POLARIZATION IN AN ILLUMINATION...
- Publication number 20170328538
- Publication date Nov 16, 2017
- Nikon Corporation
- Daniel Gene Smith
- F21 - LIGHTING
Information Patent Application
ENVIRONMENTAL SYSTEM INCLUDING VACUUM SCAVENGE FOR AN IMMERSION LIT...
- Publication number 20170235237
- Publication date Aug 17, 2017
- Nikon Corporation
- Andrew J. HAZELTON
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHODS FOR MEASURING THERMALLY INDUCED RETICLE DISTO...
- Publication number 20160341630
- Publication date Nov 24, 2016
- Nikon Corporation
- Michael Sogard
- G01 - MEASURING TESTING
Information Patent Application
ENVIRONMENTAL SYSTEM INCLUDING VACUUM SCAVENGE FOR AN IMMERSION LIT...
- Publication number 20160085159
- Publication date Mar 24, 2016
- Nikon Corporation
- Andrew J. HAZELTON
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHODS FOR MEASURING THERMALLY INDUCED RETICLE DISTO...
- Publication number 20150309418
- Publication date Oct 29, 2015
- NIKON CORPORATION
- Michael Sogard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS AND DEVICES FOR REDUCING ERRORS IN GOOS-HÄNCHEN CORRECTIONS...
- Publication number 20150015896
- Publication date Jan 15, 2015
- Nikon Corporation
- Michael Sogard
- G01 - MEASURING TESTING
Information Patent Application
ENVIRONMENTAL SYSTEM INCLUDING A TRANSPORT REGION FOR AN IMMERSION...
- Publication number 20140354967
- Publication date Dec 4, 2014
- Nikon Corporation
- W. Thomas NOVAK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITION-MEASUREMENT SYSTEMS
- Publication number 20140320832
- Publication date Oct 30, 2014
- Nikon Corporation
- Michael R. Sogard
- G01 - MEASURING TESTING
Information Patent Application
ENVIRONMENTAL SYSTEM INCLUDING VACUUM SCAVENGE FOR AN IMMERSION LIT...
- Publication number 20140320831
- Publication date Oct 30, 2014
- Nikon Corporation
- Andrew J. Hazelton
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM AND METHOD FOR COMPENSATING INSTABILITY IN AN AUTOFOCUS SYSTEM
- Publication number 20140233011
- Publication date Aug 21, 2014
- Eric Peter Goodwin
- G02 - OPTICS
Information Patent Application
APPARATUS AND METHODS FOR REDUCING AUTOFOCUS ERROR
- Publication number 20140036245
- Publication date Feb 6, 2014
- Michael Sogard
- G02 - OPTICS
Information Patent Application
METHODS AND DEVICES FOR REDUCING ERRORS IN GOOS-HÄNCHEN CORRECTIONS...
- Publication number 20130293900
- Publication date Nov 7, 2013
- Nikon Corporation
- Michael Sogard
- G01 - MEASURING TESTING
Information Patent Application
FLUID GAUGES COMPRISING MULTIPLE DIFFERENTIAL PRESSURE SENSORS
- Publication number 20130211777
- Publication date Aug 15, 2013
- Nikon Corporation
- Michael Sogard
- G01 - MEASURING TESTING
Information Patent Application
Illumination Device for optimizing polarization in an illumination...
- Publication number 20130148359
- Publication date Jun 13, 2013
- Nikon Corporation
- Daniel Gene Smith
- F21 - LIGHTING
Information Patent Application
TARGET FOR LARGE SCALE METROLOGY SYSTEM
- Publication number 20130141735
- Publication date Jun 6, 2013
- Michael Sogard
- G01 - MEASURING TESTING
Information Patent Application
STROBOSCOPIC LIGHT SOURCE FOR A TRANSMITTER OF A LARGE SCALE METROL...
- Publication number 20130003042
- Publication date Jan 3, 2013
- Michael Sogard
- G01 - MEASURING TESTING
Information Patent Application
ENVIRONMENTAL SYSTEM INCLUDING VACUUM SCAVENGE FOR AN IMMERSION LIT...
- Publication number 20120262684
- Publication date Oct 18, 2012
- Nikon Corporation
- Andrew J. Hazelton
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHODS FOR MEASURING THERMALLY INDUCED RETICLE DISTO...
- Publication number 20120099089
- Publication date Apr 26, 2012
- NIKON CORPORATION
- Michael Sogard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TEMPERATURE-CONTROLLED HOLDING DEVICES FOR PLANAR ARTICLES
- Publication number 20110211178
- Publication date Sep 1, 2011
- NIKON CORPORATION
- Michael R. Sogard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HYBRID ELECTROSTATIC CHUCK
- Publication number 20110164343
- Publication date Jul 7, 2011
- Michael Sogard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FLUID GAUGE WITH MULTIPLE REFERENCE GAPS
- Publication number 20110157576
- Publication date Jun 30, 2011
- Michael R. Sogard
- G01 - MEASURING TESTING
Information Patent Application
PHYSICAL SENSOR FOR AUTOFOCUS SYSTEM
- Publication number 20110069291
- Publication date Mar 24, 2011
- Michael R. Sogard
- G01 - MEASURING TESTING
Information Patent Application
Environmental system including vacuum scavenge for an immersion lit...
- Publication number 20110037959
- Publication date Feb 17, 2011
- Nikon Corporation
- Andrew J. Hazelton
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
System and method for compensating instability in an autofocus system
- Publication number 20100245829
- Publication date Sep 30, 2010
- Nikon Corporation
- Eric Peter Goodwin
- G02 - OPTICS
Information Patent Application
THERMAL REGULATION OF VIBRATION-SENSITIVE OBJECTS
- Publication number 20100195074
- Publication date Aug 5, 2010
- NIKON CORPORATION
- Michael R. Sogard
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
INCIDENCE SURFACES AND OPTICAL WINDOWS THAT ARE SOLVOPHOBIC TO IMME...
- Publication number 20100176304
- Publication date Jul 15, 2010
- NIKON CORPORATION
- Michael R. Sogard
- G02 - OPTICS

Michael R. Sogard

Person

Patents Grantslast 30 patents

Apparatus and methods for measuring thermally induced reticle disto...

Illumination device for optimizing polarization in an illumination...

Apparatus and methods for measuring thermally induced reticle disto...

Fluid gauges comprising multiple differential pressure sensors

Thermal regulation of vibration-sensitive objects with conduit circ...

Environmental system including vacuum scavenge for an immersion lit...

Apparatus and methods for measuring thermally induced reticle disto...

Illumination device for optimizing polarization in an illumination...

Environmental system including vacuum scavenge for an immersion lit...

Position-measurement systems

Apparatus and methods for reducing autofocus error

Apparatus and methods for measuring thermally induced reticle disto...

Methods and devices for reducing errors in Goos-Hänchen corrections...

Environmental system including vacuum scavenge for an immersion lit...

Environmental system including a transport region for an immersion...

System and method for compensating instability in an autofocus system

Apparatus and methods for measuring thermally induced reticle disto...

Methods and devices for hybridization and binding assays using ther...

Methods and devices for reducing errors in Goos-Hänchen corrections...

Environmental system including vacuum scavenge for an immersion lit...

Environmental system including vacuum scavenge for an immersion lit...

Temperature-controlled holding devices for planar articles

Fluid gauge with multiple reference gaps

Stroboscopic light source for a transmitter of a large scale metrol...

Hybrid electrostatic chuck

Environmental system including vacuum scavenge for an immersion lit...

Dynamic fluid control system for immersion lithography

Environmental system including vacuum scavenge for an immersion lit...

Environmental system including vacuum scavenge for an immersion lit...

Measurement of EUV intensity

Patents Applicationslast 30 patents

APPARATUS AND METHODS FOR MEASURING THERMALLY INDUCED RETICLE DISTO...

THERMAL REGULATION OF VIBRATION-SENSITIVE OBJECTS WITH CONDUIT CIRC...

APPARATUS AND METHODS FOR MEASURING THERMALLY INDUCED RETICLE DISTO...

ENVIRONMENTAL SYSTEM INCLUDING VACUUM SCAVENGE FOR AN IMMERSION LIT...

ILLUMINATION DEVICE FOR OPTIMIZING POLARIZATION IN AN ILLUMINATION...

ENVIRONMENTAL SYSTEM INCLUDING VACUUM SCAVENGE FOR AN IMMERSION LIT...

APPARATUS AND METHODS FOR MEASURING THERMALLY INDUCED RETICLE DISTO...

ENVIRONMENTAL SYSTEM INCLUDING VACUUM SCAVENGE FOR AN IMMERSION LIT...

APPARATUS AND METHODS FOR MEASURING THERMALLY INDUCED RETICLE DISTO...

METHODS AND DEVICES FOR REDUCING ERRORS IN GOOS-HÄNCHEN CORRECTIONS...

ENVIRONMENTAL SYSTEM INCLUDING A TRANSPORT REGION FOR AN IMMERSION...

POSITION-MEASUREMENT SYSTEMS

ENVIRONMENTAL SYSTEM INCLUDING VACUUM SCAVENGE FOR AN IMMERSION LIT...

SYSTEM AND METHOD FOR COMPENSATING INSTABILITY IN AN AUTOFOCUS SYSTEM

APPARATUS AND METHODS FOR REDUCING AUTOFOCUS ERROR

METHODS AND DEVICES FOR REDUCING ERRORS IN GOOS-HÄNCHEN CORRECTIONS...

FLUID GAUGES COMPRISING MULTIPLE DIFFERENTIAL PRESSURE SENSORS

Illumination Device for optimizing polarization in an illumination...

TARGET FOR LARGE SCALE METROLOGY SYSTEM

STROBOSCOPIC LIGHT SOURCE FOR A TRANSMITTER OF A LARGE SCALE METROL...

ENVIRONMENTAL SYSTEM INCLUDING VACUUM SCAVENGE FOR AN IMMERSION LIT...

APPARATUS AND METHODS FOR MEASURING THERMALLY INDUCED RETICLE DISTO...

TEMPERATURE-CONTROLLED HOLDING DEVICES FOR PLANAR ARTICLES

HYBRID ELECTROSTATIC CHUCK

FLUID GAUGE WITH MULTIPLE REFERENCE GAPS

PHYSICAL SENSOR FOR AUTOFOCUS SYSTEM

Environmental system including vacuum scavenge for an immersion lit...

System and method for compensating instability in an autofocus system

THERMAL REGULATION OF VIBRATION-SENSITIVE OBJECTS

INCIDENCE SURFACES AND OPTICAL WINDOWS THAT ARE SOLVOPHOBIC TO IMME...