Michael Raum

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Oberkochen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Illumination system for a microlithgraphic exposure apparatus
- Patent number 8,873,151
- Issue date Oct 28, 2014
- Carl Zeiss SMT GmbH
- Alexander Sohmer
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
Illumination System for a Microlithgraphic Exposure Apparatus
- Publication number 20080192359
- Publication date Aug 14, 2008
- Carl Zeiss SMT AG
- Alexander Sohmer
- G02 - OPTICS