Michael Rickley

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Cambridge, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for using universal cavity wafer in wafer leve...
- Patent number 10,418,249
- Issue date Sep 17, 2019
- The Charles Stark Draper Laboratory, Inc.
- Maurice Karpman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for using universal cavity wafer in wafer leve...
- Patent number 9,847,230
- Issue date Dec 19, 2017
- The Charles Stark Draper Laboratory, Inc.
- Maurice Karpman
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR USING UNIVERSAL CAVITY WAFER IN WAFER LEVE...
- Publication number 20180108533
- Publication date Apr 19, 2018
- The Charles Stark Draper Laboratory, Inc.
- Maurice Karpman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND APPARATUS FOR USING UNIVERSAL CAVITY WAFER IN WAFER LEVE...
- Publication number 20160365321
- Publication date Dec 15, 2016
- The Charles Stark Draper Laboratory, Inc.
- Maurice Karpman
- B81 - MICRO-STRUCTURAL TECHNOLOGY