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Michael Robert Biagetti
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Fishkill, NY, US
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last 30 patents
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Patent Grant
Method for creating wafer batches in an automated batch process tool
Patent number
7,890,202
Issue date
Feb 15, 2011
International Business Machines Corporation
Russell Herbert Arndt
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
METHOD FOR CREATING WAFER BATCHES IN AN AUTOMATED BATCH PROCESS TOOL
Publication number
20090099681
Publication date
Apr 16, 2009
International Business Machines Corporation
Russell Herbert Arndt
H01 - BASIC ELECTRIC ELEMENTS