Michael Rumer

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Santa Clara, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Preventing deposition on pedestal in semiconductor substrate proces...
- Patent number 11,725,285
- Issue date Aug 15, 2023
- Lam Research Corporation
- Vinayakaraddy Gulabal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-situ chamber clean end point detection systems and methods using...
- Patent number 10,895,539
- Issue date Jan 19, 2021
- Lam Research Corporation
- Kapil Sawlani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate support with increasing areal density and corresponding m...
- Patent number 10,832,936
- Issue date Nov 10, 2020
- Lam Research Corporation
- Peter Woytowitz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Physical vapor deposition of low-stress nitrogen-doped tungsten films
- Patent number 9,938,616
- Issue date Apr 10, 2018
- Lam Research Corporation
- Michael Rumer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PVD deposition process for enhanced properties of metal films
- Patent number 7,037,830
- Issue date May 2, 2006
- Novellus Systems, Inc.
- Michael Rumer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PREVENTING DEPOSITION ON PEDESTAL IN SEMICONDUCTOR SUBSTRATE PROCES...
- Publication number 20250019830
- Publication date Jan 16, 2025
- LAM RESEARCH CORPORATION
- Vinayakaraddy GULABAL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PREVENTING DEPOSITION ON PEDESTAL IN SEMICONDUCTOR SUBSTRATE PROCES...
- Publication number 20210230749
- Publication date Jul 29, 2021
- LAM RESEARCH CORPORATION
- Vinayakaraddy GULABAL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN-SITU CHAMBER CLEAN END POINT DETECTION SYSTEMS AND METHODS USING...
- Publication number 20190120775
- Publication date Apr 25, 2019
- LAM RESEARCH CORPORATION
- Kapil Sawlani
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE SUPPORT WITH INCREASING AREAL DENSITY AND CORRESPONDING M...
- Publication number 20180033672
- Publication date Feb 1, 2018
- LAM RESEARCH CORPORATION
- Peter Woytowitz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHYSICAL VAPOR DEPOSITION OF LOW-STRESS NITROGEN-DOPED TUNGSTEN FILMS
- Publication number 20160035569
- Publication date Feb 4, 2016
- LAM RESEARCH CORPORATION
- Michael Rumer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...