Michael S. Ameen

Person

Phoenix, AZ, US

People

Patents Grantslast 30 patents

Information Patent Grant
System and method for extending a lifetime of an ion source for mol...
- Patent number 11,756,772
- Issue date Sep 12, 2023
- Axcelis Technologies, Inc.
- David Sporleder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer cooling system and method
- Patent number 10,403,503
- Issue date Sep 3, 2019
- Axcelis Technologies, Inc.
- Marvin Farley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer cooling apparatus and method
- Patent number 9,978,599
- Issue date May 22, 2018
- Axcelis Technologies, Inc.
- Marvin Farley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of passivating and stabilizing a Ti-PECVD process chamber an...
- Patent number 6,635,569
- Issue date Oct 21, 2003
- Tokyo Electron Limited
- Michael S. Ameen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for preventing the premature mixture of reacta...
- Patent number 6,368,987
- Issue date Apr 9, 2002
- Tokyo Electron Limited
- Stanislaw Kopacz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for single chamber processing of PECVD-Ti and CVD-TiN films...
- Patent number 6,274,496
- Issue date Aug 14, 2001
- Tokyo Electron Limited
- Gerrit J. Leusink
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for preventing the premature mixture of reacta...
- Patent number 6,161,500
- Issue date Dec 19, 2000
- Tokyo Electron Limited
- Stanislaw Kopacz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for preparing and metallizing high aspect ratio silicon s...
- Patent number 6,143,128
- Issue date Nov 7, 2000
- Tokyo Electron Limited
- Michael S. Ameen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Elimination of titanium nitride film deposition in tungsten plug te...
- Patent number 6,093,645
- Issue date Jul 25, 2000
- Tokyo Electron Limited
- Michael S. Ameen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of titanium nitride contact plug formation
- Patent number 6,037,252
- Issue date Mar 14, 2000
- Tokyo Electron Limited
- Joseph T. Hillman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of low temperature plasma enhanced chemical vapor deposition...
- Patent number 5,989,652
- Issue date Nov 23, 1999
- Tokyo Electron Limited
- Michael S. Ameen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming salicides
- Patent number 5,972,790
- Issue date Oct 26, 1999
- Tokyo Electron Limited
- Chantal Arena
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Use of TiCl.sub.4 etchback process during integrated CVD-Ti/TiN waf...
- Patent number 5,926,737
- Issue date Jul 20, 1999
- Tokyo Electron Limited
- Michael S. Ameen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for preparing and metallizing high aspect rati...
- Patent number 5,834,371
- Issue date Nov 10, 1998
- Tokyo Electron Limited
- Michael S. Ameen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM AND METHOD FOR EXTENDING A LIFETIME OF AN ION SOURCE FOR MOL...
- Publication number 20200388468
- Publication date Dec 10, 2020
- Axcelis Technologies, Inc.
- David Sporleder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER COOLING METHOD
- Publication number 20180233367
- Publication date Aug 16, 2018
- Axcelis Technologies, Inc.
- Marvin Farley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER COOLING METHOD
- Publication number 20170352544
- Publication date Dec 7, 2017
- Axcelis Technologies, Inc.
- Marvin Farley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Michael S. Ameen

Person

Patents Grantslast 30 patents

System and method for extending a lifetime of an ion source for mol...

Wafer cooling system and method

Wafer cooling apparatus and method

Method of passivating and stabilizing a Ti-PECVD process chamber an...

Apparatus and method for preventing the premature mixture of reacta...

Method for single chamber processing of PECVD-Ti and CVD-TiN films...

Apparatus and method for preventing the premature mixture of reacta...

Apparatus for preparing and metallizing high aspect ratio silicon s...

Elimination of titanium nitride film deposition in tungsten plug te...

Method of titanium nitride contact plug formation

Method of low temperature plasma enhanced chemical vapor deposition...

Method for forming salicides

Use of TiCl.sub.4 etchback process during integrated CVD-Ti/TiN waf...

Method and apparatus for preparing and metallizing high aspect rati...

Patents Applicationslast 30 patents

SYSTEM AND METHOD FOR EXTENDING A LIFETIME OF AN ION SOURCE FOR MOL...

WAFER COOLING METHOD

WAFER COOLING METHOD