Michael S. COX

Person

Gilroy, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma abatement of compounds containing heavy atoms
- Patent number 11,185,815
- Issue date Nov 30, 2021
- Applied Materials, Inc.
- Michael S. Cox
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for exhaust cooling
- Patent number 11,114,285
- Issue date Sep 7, 2021
- Applied Materials, Inc.
- Michael S. Cox
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Non-disappearing anode for use with dielectric deposition
- Patent number 11,114,289
- Issue date Sep 7, 2021
- Applied Materials, Inc.
- Michael S. Cox
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering target with backside cooling grooves
- Patent number 11,011,356
- Issue date May 18, 2021
- Applied Materials, Inc.
- Brian T. West
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Smart chamber and smart chamber components
- Patent number 10,930,479
- Issue date Feb 23, 2021
- Applied Materials, Inc.
- Simon Nicholas Binns
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Physical vapor deposition in-chamber electro-magnet
- Patent number 10,867,776
- Issue date Dec 15, 2020
- Applied Materials, Inc.
- Brian T. West
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High pressure RF-DC sputtering and methods to improve film uniformi...
- Patent number 10,763,090
- Issue date Sep 1, 2020
- Applied Materials, Inc.
- Adolph Miller Allen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for gas abatement
- Patent number 10,757,797
- Issue date Aug 25, 2020
- Applied Materials, Inc.
- Rongping Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering target with backside cooling grooves
- Patent number 10,714,321
- Issue date Jul 14, 2020
- Applied Materials, Inc.
- Brian T. West
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Arcing detection apparatus for plasma processing
- Patent number 10,580,626
- Issue date Mar 3, 2020
- Applied Materials, Inc.
- Lin Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma abatement of compounds containing heavy atoms
- Patent number 10,449,486
- Issue date Oct 22, 2019
- Applied Materials, Inc.
- Michael S. Cox
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Gas cooled substrate support for stabilized high temperature deposi...
- Patent number 10,344,375
- Issue date Jul 9, 2019
- Applied Materials, Inc.
- Brian West
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Transparent electrostatic carrier
- Patent number 10,332,773
- Issue date Jun 25, 2019
- Applied Materials, Inc.
- Leung Kway Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer carrier for smaller wafers and wafer pieces
- Patent number 10,236,201
- Issue date Mar 19, 2019
- Applied Materials, Inc.
- Michael S. Cox
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method and apparatus for gas abatement
- Patent number 10,187,966
- Issue date Jan 22, 2019
- Applied Materials, Inc.
- Rongping Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of cooling a composition using a hall effect enhanced capaci...
- Patent number 10,176,973
- Issue date Jan 8, 2019
- Applied Materials, Inc.
- Michael S. Cox
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Smart chamber and smart chamber components
- Patent number 10,153,143
- Issue date Dec 11, 2018
- Applied Materials, Inc.
- Simon Nicholas Binns
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sputtering target with backside cooling grooves
- Patent number 10,049,863
- Issue date Aug 14, 2018
- Applied Materials, Inc.
- Brian T. West
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Locally heated multi-zone substrate support
- Patent number 9,984,912
- Issue date May 29, 2018
- Applied Materials, Inc.
- Michael S. Cox
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for treating an exhaust gas in a foreline
- Patent number 9,867,238
- Issue date Jan 9, 2018
- Applied Materials, Inc.
- Michael S. Cox
- F01 - MACHINES OR ENGINES IN GENERAL ENGINE PLANTS IN GENERAL STEAM ENGINES
Information Patent Grant
Gas cooled substrate support for stabilized high temperature deposi...
- Patent number 9,790,589
- Issue date Oct 17, 2017
- Applied Materials, Inc.
- Brian West
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering target with backside cooling grooves
- Patent number 9,779,920
- Issue date Oct 3, 2017
- Applied Materials, Inc.
- Brian T. West
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrostatic carrier for thin substrate handling
- Patent number 9,779,975
- Issue date Oct 3, 2017
- Applied Materials, Inc.
- Michael S. Cox
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-situ removable electrostatic chuck
- Patent number 9,773,692
- Issue date Sep 26, 2017
- Applied Materials, Inc.
- Michael S. Cox
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Encapsulated magnetron
- Patent number 9,754,771
- Issue date Sep 5, 2017
- Applied Materials, Inc.
- Brian T. West
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Locally heated multi-zone substrate support
- Patent number 9,735,037
- Issue date Aug 15, 2017
- Applied Materials, Inc.
- Michael S. Cox
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
End effector for transferring a substrate
- Patent number 9,721,820
- Issue date Aug 1, 2017
- Applied Materials, Inc.
- Michael S. Cox
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck for high temperature process applications
- Patent number 9,711,386
- Issue date Jul 18, 2017
- Applied Materials, Inc.
- Michael S. Cox
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma abatement of compounds containing heavy atoms
- Patent number 9,649,592
- Issue date May 16, 2017
- Applied Materials, Inc.
- Michael S. Cox
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Deposition apparatus and methods to reduce deposition asymmetry
- Patent number 9,580,796
- Issue date Feb 28, 2017
- Applied Materials, Inc.
- Alan Ritchie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
HIGH PRESSURE RF-DC SPUTTERING AND METHODS TO IMPROVE FILM UNIFORMI...
- Publication number 20200357616
- Publication date Nov 12, 2020
- Applied Materials, Inc.
- Adolph Miller ALLEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING TARGET WITH BACKSIDE COOLING GROOVES
- Publication number 20200294778
- Publication date Sep 17, 2020
- Applied Materials, Inc.
- Brian T. WEST
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHYSICAL VAPOR DEPOSITION IN-CHAMBER ELECTRO-MAGNET
- Publication number 20190348259
- Publication date Nov 14, 2019
- Applied Materials, Inc.
- Brian T. WEST
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR GAS ABATEMENT
- Publication number 20190246481
- Publication date Aug 8, 2019
- Applied Materials, Inc.
- Rongping WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SMART CHAMBER AND SMART CHAMBER COMPONENTS
- Publication number 20190096643
- Publication date Mar 28, 2019
- Applied Materials, Inc.
- Simon Nicholas BINNS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ABATEMENT OF COMPOUNDS CONTAINING HEAVY ATOMS
- Publication number 20190022577
- Publication date Jan 24, 2019
- Applied Materials, Inc.
- Michael S. COX
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPUTTERING TARGET WITH BACKSIDE COOLING GROOVES
- Publication number 20180342378
- Publication date Nov 29, 2018
- Applied Materials, Inc.
- Brian T. WEST
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA ABATEMENT OF COMPOUNDS CONTAINING HEAVY ATOMS
- Publication number 20180318758
- Publication date Nov 8, 2018
- Applied Materials, Inc.
- Michael S. COX
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS COOLED SUBSTRATE SUPPORT FOR STABILIZED HIGH TEMPERATURE DEPOSI...
- Publication number 20180037987
- Publication date Feb 8, 2018
- Applied Materials, Inc.
- Brian WEST
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING TARGET WITH BACKSIDE COOLING GROOVES
- Publication number 20180019108
- Publication date Jan 18, 2018
- Applied Materials, Inc.
- Brian T. WEST
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOCALLY HEATED MULTI-ZONE SUBSTRATE SUPPORT
- Publication number 20180019148
- Publication date Jan 18, 2018
- Applied Materials, Inc.
- Michael S. COX
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NON-DISAPPEARING ANODE FOR USE WITH DIELECTRIC DEPOSITION
- Publication number 20170316924
- Publication date Nov 2, 2017
- Applied Materials, Inc.
- Michael S. COX
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR EXHAUST COOLING
- Publication number 20170301524
- Publication date Oct 19, 2017
- Applied Materials, Inc.
- Michael S. COX
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ABATEMENT OF COMPOUNDS CONTAINING HEAVY ATOMS
- Publication number 20170216767
- Publication date Aug 3, 2017
- Applied Materials, Inc.
- Michael S. COX
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
ARCING DETECTION APPARATUS FOR PLASMA PROCESSING
- Publication number 20170162370
- Publication date Jun 8, 2017
- Applied Materials, Inc.
- Lin ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HALL EFFECT ENHANCED CAPACITIVELY COUPLED PLASMA SOURCE, AN ABATEME...
- Publication number 20170133208
- Publication date May 11, 2017
- Applied Materials, Inc.
- Michael S. COX
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CARRIER FOR THIN SUBSTRATE HANDLING
- Publication number 20170062261
- Publication date Mar 2, 2017
- Applied Materials, Inc.
- Michael S. COX
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN-SITU REMOVABLE ELECTROSTATIC CHUCK
- Publication number 20170062260
- Publication date Mar 2, 2017
- Applied Materials, Inc.
- Michael S. COX
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH PRESSURE RF-DC SPUTTERING AND METHODS TO IMPROVE FILM UNIFORMI...
- Publication number 20170029941
- Publication date Feb 2, 2017
- Applied Materials, Inc.
- Adolph Miller ALLEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOCALLY HEATED MULTI-ZONE SUBSTRATE SUPPORT
- Publication number 20170032995
- Publication date Feb 2, 2017
- Applied Materials, Inc.
- Michael S. COX
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR GAS ABATEMENT
- Publication number 20170027049
- Publication date Jan 26, 2017
- Applied Materials, Inc.
- Rongping WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS TO ABATE PYROPHORIC BYPRODUCTS FROM ION IMPLAN...
- Publication number 20160376710
- Publication date Dec 29, 2016
- Applied Materials, Inc.
- Dustin W. HO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER CARRIER FOR SMALLER WAFERS AND WAFER PIECES
- Publication number 20160365269
- Publication date Dec 15, 2016
- Applied Materials, Inc.
- Michael S. COX
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSPARENT ELECTROSTATIC CARRIER
- Publication number 20160358803
- Publication date Dec 8, 2016
- Applied Materials, Inc.
- Leung Kway LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HALL EFFECT ENHANCED CAPACITIVELY COUPLED PLASMA SOURCE, AN ABATEME...
- Publication number 20160133442
- Publication date May 12, 2016
- Applied Materials, Inc.
- Michael S. COX
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HALL EFFECT ENHANCED CAPACITIVELY COUPLED PLASMA SOURCE
- Publication number 20160118226
- Publication date Apr 28, 2016
- Applied Materials, Inc.
- Michael S. COX
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SMART CHAMBER AND SMART CHAMBER COMPONENTS
- Publication number 20150262798
- Publication date Sep 17, 2015
- Applied Materials, Inc.
- Simon Nicholas BINNS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HALL EFFECT ENHANCED CAPACITIVELY COUPLED PLASMA SOURCE
- Publication number 20150255251
- Publication date Sep 10, 2015
- Applied Materials, Inc.
- Michael S. COX
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HALL EFFECT ENHANCED CAPACITIVELY COUPLED PLASMA SOURCE, AN ABATEME...
- Publication number 20150255256
- Publication date Sep 10, 2015
- Applied Materials, Inc.
- Michael S. COX
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ABATEMENT OF COMPOUNDS CONTAINING HEAVY ATOMS
- Publication number 20150251133
- Publication date Sep 10, 2015
- Applied Materials, Inc.
- Michael S. COX
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL

Michael S. COX

Person

Patents Grantslast 30 patents

Plasma abatement of compounds containing heavy atoms

Apparatus for exhaust cooling

Non-disappearing anode for use with dielectric deposition

Sputtering target with backside cooling grooves

Smart chamber and smart chamber components

Physical vapor deposition in-chamber electro-magnet

High pressure RF-DC sputtering and methods to improve film uniformi...

Method and apparatus for gas abatement

Sputtering target with backside cooling grooves

Arcing detection apparatus for plasma processing

Plasma abatement of compounds containing heavy atoms

Gas cooled substrate support for stabilized high temperature deposi...

Transparent electrostatic carrier

Wafer carrier for smaller wafers and wafer pieces

Method and apparatus for gas abatement

Method of cooling a composition using a hall effect enhanced capaci...

Smart chamber and smart chamber components

Sputtering target with backside cooling grooves

Locally heated multi-zone substrate support

Apparatus for treating an exhaust gas in a foreline

Gas cooled substrate support for stabilized high temperature deposi...

Sputtering target with backside cooling grooves

Electrostatic carrier for thin substrate handling

In-situ removable electrostatic chuck

Encapsulated magnetron

Locally heated multi-zone substrate support

End effector for transferring a substrate

Electrostatic chuck for high temperature process applications

Plasma abatement of compounds containing heavy atoms

Deposition apparatus and methods to reduce deposition asymmetry

Patents Applicationslast 30 patents

HIGH PRESSURE RF-DC SPUTTERING AND METHODS TO IMPROVE FILM UNIFORMI...

SPUTTERING TARGET WITH BACKSIDE COOLING GROOVES

PHYSICAL VAPOR DEPOSITION IN-CHAMBER ELECTRO-MAGNET

METHOD AND APPARATUS FOR GAS ABATEMENT

SMART CHAMBER AND SMART CHAMBER COMPONENTS

PLASMA ABATEMENT OF COMPOUNDS CONTAINING HEAVY ATOMS

SPUTTERING TARGET WITH BACKSIDE COOLING GROOVES

PLASMA ABATEMENT OF COMPOUNDS CONTAINING HEAVY ATOMS

GAS COOLED SUBSTRATE SUPPORT FOR STABILIZED HIGH TEMPERATURE DEPOSI...

SPUTTERING TARGET WITH BACKSIDE COOLING GROOVES

LOCALLY HEATED MULTI-ZONE SUBSTRATE SUPPORT

NON-DISAPPEARING ANODE FOR USE WITH DIELECTRIC DEPOSITION

APPARATUS FOR EXHAUST COOLING

PLASMA ABATEMENT OF COMPOUNDS CONTAINING HEAVY ATOMS

ARCING DETECTION APPARATUS FOR PLASMA PROCESSING

HALL EFFECT ENHANCED CAPACITIVELY COUPLED PLASMA SOURCE, AN ABATEME...

ELECTROSTATIC CARRIER FOR THIN SUBSTRATE HANDLING

IN-SITU REMOVABLE ELECTROSTATIC CHUCK

HIGH PRESSURE RF-DC SPUTTERING AND METHODS TO IMPROVE FILM UNIFORMI...

LOCALLY HEATED MULTI-ZONE SUBSTRATE SUPPORT

METHOD AND APPARATUS FOR GAS ABATEMENT

METHOD AND APPARATUS TO ABATE PYROPHORIC BYPRODUCTS FROM ION IMPLAN...

WAFER CARRIER FOR SMALLER WAFERS AND WAFER PIECES

TRANSPARENT ELECTROSTATIC CARRIER

HALL EFFECT ENHANCED CAPACITIVELY COUPLED PLASMA SOURCE, AN ABATEME...

HALL EFFECT ENHANCED CAPACITIVELY COUPLED PLASMA SOURCE

SMART CHAMBER AND SMART CHAMBER COMPONENTS

HALL EFFECT ENHANCED CAPACITIVELY COUPLED PLASMA SOURCE

HALL EFFECT ENHANCED CAPACITIVELY COUPLED PLASMA SOURCE, AN ABATEME...

PLASMA ABATEMENT OF COMPOUNDS CONTAINING HEAVY ATOMS