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Michael S. Hibbs

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  • Westford, VT, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    Reticle carrier
    • Patent number 8,815,475
    • Issue date Aug 26, 2014
    • International Business Machines Corporation
    • Kevin S. Petrarca
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Reticle carrier
    • Patent number 8,439,728
    • Issue date May 14, 2013
    • International Business Machines Corporation
    • Kevin S. Petrarca
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    EMF correction model calibration using asymmetry factor data obtain...
    • Patent number 8,271,910
    • Issue date Sep 18, 2012
    • International Business Machines Corporation
    • Jaione Tirapu-Azpiroz
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Method of manufacture of damascene reticle
    • Patent number 8,110,321
    • Issue date Feb 7, 2012
    • International Business Machines Corporation
    • Kevin S. Petrarca
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Alternating phase shift mask inspection using biased inspection data
    • Patent number 7,742,632
    • Issue date Jun 22, 2010
    • International Business Machines Corporation
    • Karen D. Badger
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Phase calibration for attenuating phase-shift masks
    • Patent number 7,642,016
    • Issue date Jan 5, 2010
    • International Business Machines Corporation
    • Michael S. Hibbs
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Mask defect analysis system
    • Patent number 7,492,940
    • Issue date Feb 17, 2009
    • International Business Machines Corporation
    • James A. Bruce
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Mask defect analysis system
    • Patent number 7,492,941
    • Issue date Feb 17, 2009
    • International Business Machines Corporation
    • James A. Bruce
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Pellicle film optimized for immersion lithography systems with NA>1
    • Patent number 7,416,820
    • Issue date Aug 26, 2008
    • International Business Machines Corporation
    • Timothy A Brunner
    • Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Information Patent Grant

    Mask defect analysis system
    • Patent number 7,257,247
    • Issue date Aug 14, 2007
    • International Business Machines Corporation
    • James A. Bruce
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Method and apparatus for correcting gravitational sag in photomasks...
    • Patent number 7,239,376
    • Issue date Jul 3, 2007
    • International Business Machines Corporation
    • Michael S. Hibbs
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Wafer thickness control during backside grind
    • Patent number 7,134,933
    • Issue date Nov 14, 2006
    • International Business Machines Corporation
    • Donald W. Brouillette
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Pellicle distortion reduction
    • Patent number 7,061,590
    • Issue date Jun 13, 2006
    • International Business Machines Corporation
    • Michael S. Hibbs
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    In-situ pellicle monitor
    • Patent number 7,060,403
    • Issue date Jun 13, 2006
    • International Business Machines Corporation
    • Michael Straight Hibbs
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Attenuated embedded phase shift photomask blanks
    • Patent number 6,979,518
    • Issue date Dec 27, 2005
    • International Business Machines Corporation
    • Marie Angelopoulos
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Apparatus and method for inspection of photolithographic mask
    • Patent number 6,950,183
    • Issue date Sep 27, 2005
    • International Business Machines Corporation
    • Timothy A. Brunner
    • G01 - MEASURING TESTING
  • Information Patent Grant

    Wafer thickness control during backside grind
    • Patent number 6,887,126
    • Issue date May 3, 2005
    • International Business Machines Corporation
    • Donald W. Brouillette
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Attenuated embedded phase shift photomask blanks
    • Patent number 6,858,357
    • Issue date Feb 22, 2005
    • International Business Machines Corporation
    • Marie Angelopoulos
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    In-situ pellicle monitor
    • Patent number 6,835,502
    • Issue date Dec 28, 2004
    • International Business Machines Corporation
    • Michael Straight Hibbs
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Method and apparatus for reduction of high-frequency vibrations in...
    • Patent number 6,834,548
    • Issue date Dec 28, 2004
    • International Business Machines Corporation
    • Michael S. Hibbs
    • G01 - MEASURING TESTING
  • Information Patent Grant

    Self-aligned alternating phase shift mask patterning process
    • Patent number 6,824,932
    • Issue date Nov 30, 2004
    • International Business Machines Corporation
    • Scott J. Bukofsky
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Pellicle distortion reduction
    • Patent number 6,731,378
    • Issue date May 4, 2004
    • International Business Machines Corporation
    • Michael S. Hibbs
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Attenuated embedded phase shift photomask blanks
    • Patent number 6,730,445
    • Issue date May 4, 2004
    • International Business Machines Corporation
    • Marie Angelopoulos
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Attenuated embedded phase shift photomask blanks
    • Patent number 6,682,860
    • Issue date Jan 27, 2004
    • International Business Machines Corporation
    • Marie Angelopoulos
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Attenuated embedded phase shift photomask blanks
    • Patent number 6,653,027
    • Issue date Nov 25, 2003
    • International Business Machines Corporation
    • Marie Angelopoulos
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Assist features for contact hole mask patterns
    • Patent number 6,627,361
    • Issue date Sep 30, 2003
    • International Business Machines Corporation
    • Orest Bula
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Repair of masks to promote adhesion of patches
    • Patent number 6,582,857
    • Issue date Jun 24, 2003
    • International Business Machines Corporation
    • Philip S. Flanigan
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Wafer thickness control during backside grind
    • Patent number 6,368,881
    • Issue date Apr 9, 2002
    • International Business Machines Corporation
    • Donald W. Brouillette
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Method and apparatus for image adjustment
    • Patent number 6,284,443
    • Issue date Sep 4, 2001
    • International Business Machines Corporation
    • Brent A. Anderson
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Methods for repair of photomasks
    • Patent number 6,190,836
    • Issue date Feb 20, 2001
    • International Business Machines Corporation
    • Brian J. Grenon
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents