Michael S. Lysik

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Yorba Linda, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Line narrowing unit with flexural grating mount
- Patent number 6,496,528
- Issue date Dec 17, 2002
- Cymer, Inc.
- Clay C. Titus
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Line narrowing unit with flexural grating mount
- Publication number 20020034208
- Publication date Mar 21, 2002
- Clay C. Titus
- H01 - BASIC ELECTRIC ELEMENTS