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Michael Silbert
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Sykesville, MD, US
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last 30 patents
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Patent Grant
Hydrocarbon dielectric heat transfer fluids for microwave plasma ge...
Patent number
7,338,575
Issue date
Mar 4, 2008
Axcelis Technologies, Inc.
Richard E. Pingree, Jr.
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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Patent Application
Hydrocarbon dielectric heat transfer fluids for microwave plasma ge...
Publication number
20060054281
Publication date
Mar 16, 2006
Richard E. Pingree
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR