Michael Smigel

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Phoenix, AZ, US

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Patents Grantslast 30 patents

Information Patent Grant
CMP apparatus and load cup mechanism
- Patent number 7,354,335
- Issue date Apr 8, 2008
- Novellus Systems, Inc.
- David T. Marquardt
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Workpiece handling end-effector and a method for processing workpie...
- Patent number 6,979,034
- Issue date Dec 27, 2005
- SpeedFam-IPEC Corporation
- Randy McNurlin
- B24 - GRINDING POLISHING
Information Patent Grant
Workpiece handling end-effector and a method for processing workpie...
- Patent number 6,752,442
- Issue date Jun 22, 2004
- SpeedFam-IPEC Corporation
- Randy McNurlin
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for teaching robot station location
- Patent number 6,567,725
- Issue date May 20, 2003
- SpeedFam-IPEC Corporation
- Ann Wilkey
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
CMP apparatus and load cup mechanism
- Publication number 20050227595
- Publication date Oct 13, 2005
- David T. Marquardt
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Workpiece handling end-effector and a method for processing workpie...
- Publication number 20040174029
- Publication date Sep 9, 2004
- Randy McNurlin
- B24 - GRINDING POLISHING
Information Patent Application
Workpiece handling end-effector and a method for processing workpie...
- Publication number 20030092358
- Publication date May 15, 2003
- Randy McNurlin
- B24 - GRINDING POLISHING