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Michael St. Peter
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Gloucester, MA, US
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last 30 patents
Information
Patent Grant
System and method for improved beam current from an ion source
Patent number
11,232,925
Issue date
Jan 25, 2022
Applied Materials, Inc.
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for improved beam current from an ion source
Patent number
11,120,966
Issue date
Sep 14, 2021
Applied Materials, Inc.
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion source crucible for solid feed materials
Patent number
10,600,611
Issue date
Mar 24, 2020
Applied Materials, Inc.
Klaus Becker
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Source housing assembly for controlling ion beam extraction stabili...
Patent number
9,934,928
Issue date
Apr 3, 2018
Varian Semiconductor Equipment Associates, Inc.
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method to control ion beam current
Patent number
9,396,903
Issue date
Jul 19, 2016
Varian Semiconductor Equipment Associates, Inc.
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
System And Method For Improved Beam Current From An Ion Source
Publication number
20210066019
Publication date
Mar 4, 2021
Applied Materials, Inc.
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
System And Method For Improved Beam Current From An Ion Source
Publication number
20210066017
Publication date
Mar 4, 2021
Applied Materials, Inc.
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Ion Source Crucible For Solid Feed Materials
Publication number
20190180971
Publication date
Jun 13, 2019
Applied Materials, Inc.
Klaus Becker
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SOURCE HOUSING ASSEMBLY FOR CONTROLLING ION BEAM EXTRACTION STABILI...
Publication number
20160336138
Publication date
Nov 17, 2016
Varian Semiconductor Equipment Associates, Inc.
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD TO CONTROL ION BEAM CURRENT
Publication number
20160233048
Publication date
Aug 11, 2016
Varian Semiconductor Equipment Associates, Inc.
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS