Michael STEIGERWALD

Person

Westhausen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Method of processing of an object
- Patent number 8,816,303
- Issue date Aug 26, 2014
- Carl Zeiss Microscopy GmbH
- Josef Biberger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning charged particle beams
- Patent number 8,304,750
- Issue date Nov 6, 2012
- Carl Zeiss NTS GmbH
- Dirk Preikszas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Positioning device for a particle beam apparatus
- Patent number 8,283,641
- Issue date Oct 9, 2012
- Carl Zeiss NTS GmbH
- Dietmar Dönitz
- B08 - CLEANING
Information Patent Grant
Particle optical device with magnet assembly
- Patent number 8,063,364
- Issue date Nov 22, 2011
- Carl Zeiss NTS GmbH
- Dirk Preikszas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron-beam device and detector system
- Patent number 7,910,887
- Issue date Mar 22, 2011
- Carl Zeiss NTS GmbH
- Michael D. G. Steigerwald
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion sources, systems and methods
- Patent number 7,518,122
- Issue date Apr 14, 2009
- ALIS Corporation
- Billy W. Ward
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron-beam device and detector system
- Patent number 7,507,962
- Issue date Mar 24, 2009
- Carl Zeiss NTS GmbH
- Michael D. G. Steigerwald
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron-beam device and detector system
- Patent number 7,425,701
- Issue date Sep 16, 2008
- Carl Zeiss NTS GmbH
- Michael D. G. Steigerwald
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle-optical arrangements and particle-optical systems
- Patent number 7,022,987
- Issue date Apr 4, 2006
- Carl Zeiss NIS GmbH
- Dirk Preikszas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron microscopy system, electron microscopy method and focusing...
- Patent number 6,949,744
- Issue date Sep 27, 2005
- Carl Zeiss NTS GmbH
- Michael Steigerwald
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Examining system for the particle-optical imaging of an object, def...
- Patent number 6,903,337
- Issue date Jun 7, 2005
- Carl Zeiss SMT AG
- Oliver Kienzle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Objective lens for an electron microscopy system and electron micro...
- Patent number 6,855,938
- Issue date Feb 15, 2005
- Carl Zeiss NTS GmbH
- Dirk Preikszas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam source, electron optical apparatus using such beam so...
- Patent number 6,828,565
- Issue date Dec 7, 2004
- LEO Elektronenmikroskopie GmbH
- Michael Steigerwald
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method of Processing of an Object
- Publication number 20120145895
- Publication date Jun 14, 2012
- CARL ZEISS NTS GMBH
- Josef BIBERGER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING CHARGED PARTICLE BEAMS
- Publication number 20100294930
- Publication date Nov 25, 2010
- CARL ZEISS NTS GMBH
- Dirk Preikszas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE OPTICAL DEVICE WITH MAGNET ASSEMBLY
- Publication number 20100155597
- Publication date Jun 24, 2010
- CARL ZEISS NTS GMBH
- Dirk PREIKSZAS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POSITIONING DEVICE FOR A PARTICLE BEAM APPARATUS
- Publication number 20100044566
- Publication date Feb 25, 2010
- Dietmar DONITZ
- B08 - CLEANING
Information Patent Application
Electron-beam device and detector system
- Publication number 20090309024
- Publication date Dec 17, 2009
- MICHAEL D.G. STEIGERWALD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion sources, systems and methods
- Publication number 20070187621
- Publication date Aug 16, 2007
- Billy W. Ward
- B82 - NANO-TECHNOLOGY
Information Patent Application
Electron-beam device and detector system
- Publication number 20070120071
- Publication date May 31, 2007
- Michael D.G. Steigerwald
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron microscopy system, electron microscopy method and focusing...
- Publication number 20050006582
- Publication date Jan 13, 2005
- LEO Elektronenmikroskopie GmbH
- Michael Steigerwald
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron-beam device and detector system
- Publication number 20040245465
- Publication date Dec 9, 2004
- Michael D.G. Steigerwald
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron beam source, electron optical apparatus using such beam so...
- Publication number 20040124365
- Publication date Jul 1, 2004
- LEO Elektronenmikroskopie GmbH
- Michael Steigerwald
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Objective lens for an electron microscopy system and electron micro...
- Publication number 20040084629
- Publication date May 6, 2004
- LEO Elektronenmikroskopie GmbH
- Dirk Preikszas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Particle-optical arrangements and particle-optical systems
- Publication number 20040075053
- Publication date Apr 22, 2004
- LEO Elektronenmikroskopie GmbH
- Dirk Preikszas
- H01 - BASIC ELECTRIC ELEMENTS

Michael STEIGERWALD

Person

Patents Grantslast 30 patents

Method of processing of an object

Scanning charged particle beams

Positioning device for a particle beam apparatus

Particle optical device with magnet assembly

Electron-beam device and detector system

Ion sources, systems and methods

Electron-beam device and detector system

Electron-beam device and detector system

Particle-optical arrangements and particle-optical systems

Electron microscopy system, electron microscopy method and focusing...

Examining system for the particle-optical imaging of an object, def...

Objective lens for an electron microscopy system and electron micro...

Electron beam source, electron optical apparatus using such beam so...

Patents Applicationslast 30 patents

Method of Processing of an Object

SCANNING CHARGED PARTICLE BEAMS

PARTICLE OPTICAL DEVICE WITH MAGNET ASSEMBLY

POSITIONING DEVICE FOR A PARTICLE BEAM APPARATUS

Electron-beam device and detector system

Ion sources, systems and methods

Electron-beam device and detector system

Electron microscopy system, electron microscopy method and focusing...

Electron-beam device and detector system

Electron beam source, electron optical apparatus using such beam so...

Objective lens for an electron microscopy system and electron micro...

Particle-optical arrangements and particle-optical systems