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Michael Stolz
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Cottbus, DE
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last 30 patents
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Patent Grant
Electrostatically deflectable micromechanical device
Patent number
10,483,876
Issue date
Nov 19, 2019
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung E.V.
Sergiu Langa
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Micromechanical device with an actively deflectable element
Patent number
9,676,607
Issue date
Jun 13, 2017
Fraunhofer Gesellschaft zur Foerderung der angewandten Forschung e.V.
Matthieu Gaudet
B81 - MICRO-STRUCTURAL TECHNOLOGY
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last 30 patents
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Patent Application
MEMS, METHOD OF MANUFACTURING AN MEMS AND METHOD OF CONFIGURING AN...
Publication number
20240092633
Publication date
Mar 21, 2024
Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
Anton MELNIKOV
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
MICROMECHANICAL DEVICE WITH AN ACTIVELY DEFLECTABLE ELEMENT
Publication number
20160304333
Publication date
Oct 20, 2016
Fraunhofer-Gesellschaft zur foerderung der Angewandten Forschung e.V.
Matthieu Gaudet
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
ELECTROSTATICALLY DEFLECTABLE MICROMECHANICAL DEVICE
Publication number
20160173001
Publication date
Jun 16, 2016
Fraunhofer-Gesellschaft zur foerderung der Angewandten Forschung e.V.
Sergiu Langa
B81 - MICRO-STRUCTURAL TECHNOLOGY