Michael T. Starr

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Substrate temperature regulating support pins
- Patent number 7,461,794
- Issue date Dec 9, 2008
- Applied Materials, Inc.
- Hien-Minh Huu Le
- G05 - CONTROLLING REGULATING
Information Patent Grant
Automated substrate processing systems and methods
- Patent number 6,257,045
- Issue date Jul 10, 2001
- Applied Komatsu Technology, Inc.
- Akihiro Hosokawa
- G05 - CONTROLLING REGULATING
Information Patent Grant
Automated substrate processing systems and methods
- Patent number 6,205,870
- Issue date Mar 27, 2001
- Applied Komatsu Technology, Inc.
- Akihiro Hosokawa
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
Substrate temperature regulating support pins
- Publication number 20070040041
- Publication date Feb 22, 2007
- Hien-Minh Huu Le
- G05 - CONTROLLING REGULATING