Michael Toeller

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Austin, TX, US

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Patents Grantslast 30 patents

Information Patent Grant
Formation of ultra-thin oxide layers by self-limiting interfacial o...
- Patent number 7,235,440
- Issue date Jun 26, 2007
- Tokyo Electron Limited
- David L O'Meara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming uniform ultra-thin oxynitride layers
- Patent number 7,202,186
- Issue date Apr 10, 2007
- Tokyo Electron Limited
- David L O'Meara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
IN-SITU ATOMIC LAYER DEPOSITION
- Publication number 20070037412
- Publication date Feb 15, 2007
- TOKYO ELECTRON LIMITED
- Anthony Dip
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Formation of a metal-containing film by sequential gas exposure in...
- Publication number 20050056219
- Publication date Mar 17, 2005
- TOKYO ELECTRON LIMITED
- Anthony Dip
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Formation of ultra-thin oxide layers by self-limiting interfacial o...
- Publication number 20050026453
- Publication date Feb 3, 2005
- TOKYO ELECTRON LIMITED
- David L. O'Meara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of forming uniform ultra-thin oxynitride layers
- Publication number 20050026459
- Publication date Feb 3, 2005
- TOKYO ELECTRON LIMITED
- David L. O'Meara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...